BS ISO 14701:2011
$142.49
Surface chemical analysis. X-ray photoelectron spectroscopy. Measurement of silicon oxide thickness
Published By | Publication Date | Number of Pages |
BSI | 2011 | 24 |
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Status | Withdrawn |
---|---|
Title | Surface chemical analysis. X-ray photoelectron spectroscopy. Measurement of silicon oxide thickness |
Publisher | BSI |
Committee | CII/60 |
Pages | 24 |
Publication Date | 2011-08-31 |
Withdrawn Date | 2018-11-05 |
Replaced By | BS ISO 14701:2018 |
ISBN | 978 0 580 69624 4 |
Standard Number | BS ISO 14701:2011 |
Identical National Standard Of | ISO 14701:2011 |
Descriptors | Silicon, Surface chemistry, Surface properties, X-ray photoelectron spectroscopy, Chemical analysis and testing, Thickness measurement, Electron emission, Photoelectron spectroscopy, Oxides, Spectroscopy |
ICS Codes | 71.040.40 - Chemical analysis |
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