UNE-EN 62047-6:2010
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Semiconductor devices – Micro-electromechanical devices — Part 6: Axial fatigue testing methods of thin film materials
| Published By | Publication Date | Number of Pages |
| AENOR | 2010-06-01 | 19 |
| Published Code | AENOR |
|---|---|
| Published By | Asociación Española de Normalización |
| Publication Date | 2010-06-01 |
| Pages Count | 19 |
| Language | English |
| File Size | 399.4 KB |
| ICS Codes | 31.080.99 - Other semiconductor devices |
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