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ASME B5.64 2022

ASME B5.64 2022

$98.04

ASME B5.64-2022 Methods for the Performance Evaluation of Single-Axis Linear Positioning Systems

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ASME 2022 165
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This Standard establishes a methodology for specifying and testing the performance of single-axis linear positioning systems. It covers linear positioning systems with travels ranging from micrometers to meters. This Standard describes equivalent test methods and instrumentation described in existing machine tool standards (ASME B5.54, ASME B5.57, and ISO 230 series) and additional methods and instrumentation used for the characterization of positioning systems having a relatively high positioning performance when compared to standard machine tool performance. This Standard seeks to highlight the importance of understanding measurement uncertainty and the test uncertainty ratio (TUR) by providing methods for estimating the test uncertainty and the uncertainty of positioning performance results. In addition to clarifying the positioning performance evaluation, this Standard facilitates performance comparisons between systems by unifying terminology and the treatments of environmental effects and measurement uncertainty. This Standard provides a series of tests that should be used to perform acceptance testing of new and reconditioned positioning systems and could be used to verify the continued capability of systems, already in operation, through periodic testing. The set of acceptance tests and the specification limits for system conformance shall be the subject of contractual agreement between the user and the manufacturer/supplier.

PDF Catalog

PDF Pages PDF Title
4 CONTENTS
9 Foreword
10 ASME B5 COMMITTEE ROSTER
11 CORRESPONDENCE WITH THE B5 COMMITTEE
14 Section 1 Scope
1-1 SCOPE
15 Section 2 References
2-1 NORMATIVE REFERENCES
2-2 INFORMATIVE REFERENCES
18 Section 3 Nomenclature
3-1 NOMENCLATURE
3-1.1 General
22 3-1.2 Symbols and Units of Measure
23 3-1.3 Acronyms
24 Section 4 Definitions
4-1 INTRODUCTION
4-2 TERMS AND DEFINITONS
36 Section 5 Measurement Points, Coordinate Systems, and System Positioning Errors
5-1 INTRODUCTION
5-2 MEASUREMENT POINT
Figures
Figure 5-2-1 Measurement Point (MP)
37 5-3 CARRIAGE AND BASE COORDINATE SYSTEMS
Figure 5-3-1 Right-Handed Coordinate System Showing Directionality of Motion
Figure 5-3-2 Motion of the Functional Point (FP) With Respect to the Frame Coordinate System (csF)
38 5-4 CARRIAGE ORIGIN POINT
5-5 SYSTEM POSITIONING ERROR MOTION NOMENCLATURE
Figure 5-5-1 Error Motions of a Single-Axis Linear Positioning System Designed to Traverse Along the X-Axis
39 5-6 MEASUREMENT POINT TRANSFORMATIONS
40 Section 6 Environmental Specifications
6-1 GENERAL
6-2 TEMPERATURE
6-2.1 General
6-2.2 Thermal Environment Guidelines
6-2.3 Time Variations
41 6-2.4 Thermal Radiant Energy
6-3 AIR HUMIDITY
6-3.1 General
6-3.2 Responsibilities
6-3.3 Specifications
6-4 BAROMETRIC PRESSURE
6-4.1 General
6-4.2 Responsibilities
6-4.3 Specifications
6-5 BASE VIBRATION
6-5.1 General
42 6-5.2 Responsibilities
6-5.3 Base Vibrational Parameters
6-6 ELECTRICAL
6-6.1 General
6-6.2 Responsibilities
6-6.3 Electrical Parameters
6-7 UTILITY AIR
6-7.1 General
6-7.2 Responsibilities
43 6-7.3 Specifications
44 Section 7 Positioning Performance
7-1 GENERAL
7-2 IN-POSITION JITTER TEST
7-2.1 General
7-2.2 General Measurement Setup
45 Figure 7-2.2.2-1 Example Measurement Setup for In-Position Jitter Test in the Z-Direction at Point (dx, dy, dz)
46 7-2.3 Measurement Procedure
7-2.4 Data Analysis
7-2.5 Uncertainty Analysis
47 7-2.6 Presentation of Results
7-3 MOVE-AND-SETTLE TEST
7-3.1 General
7-3.2 Measurement Setup
7-3.3 Measurement Procedure
48 Figure 7-2.6-1 Example of an In-Position Jitter Test Report
49 7-3.4 Data Analysis
50 Figure 7-3.4.2-1 Example Moving Average Error, Calculated With a Process Window Time of 50 ms
51 Figure 7-3.4.2-2 Example Moving Standard Deviation, Calculated With a Process Window Time of 50 ms
52 Figure 7-3.4.2-3 Example Moving Peak Error, Calculated With a Process Window Time of 50 ms
53 7-3.5 Test Uncertainty Analysis
7-3.6 Presentation of Results
7-4 INCREMENTAL STEP TEST AND MINIMUM INCREMENTAL MOTION TEST
7-4.1 General
7-4.2 General Measurement Setup
Tables
Table 7-3.4.3-1 Move-and-Settle Times for Various Metrics Using a Settling Criteria of 0.05 μm for a Process Window Time of 50 ms
54 Figure 7-3.5-1 Moving Average Error for Multiple Move-and-Settle Tests
55 Figure 7-3.6-1 Example of a Move-and-Settle Test Report
56 7-4.3 Incremental Step Test
Figure 7-4.3.1-1 Example Displacement Vs. Time Plot for an Incremental Step Test With a 2.5 nm Commanded Step Size
57 Figure 7-4.3.1-2 Illustration of Move-and-Settle Time, tms, and Average Time, tave
59 7-4.4 Incremental Step Reversal Error
Figure 7-4.4-1 Successively Decreasing Steps Used to Measure the Incremental Step Reversal Error
60 7-4.5 Minimum Incremental Motion
7-4.6 Test Uncertainty Analysis
7-4.7 Presentation of Results
7-5 STATIC POSITIONING ACCURACY AND REPEATABILITY
7-5.1 Modes of Operation
61 Figure 7-4.7-1 Example of an Incremental Step Test and Minimum Incremental Motion Test Report
62 7-5.2 Measurement Setup
63 7-5.3 Measurement Procedure
Figure 7-5.2.3-1 Illustration of Travel Range and Measurement Range
64 7-5.4 Data Analysis
Figure 7-5.3-1 Example Test Cycle Having m = 10 Points Measured Bidirectionally 5 Times, 5 per Direction and Each Endpoint Measured Unidirectionally 5 Times
66 Figure 7-5.4.4-1 Abbe Error for Both Pitch Angle, αij, and Yaw Angle, βij, for the Case of Measuring With an Interferometer
67 Figure 7-5.4.5-1 Examples of Measurement Data With Different Normalizations
68 7-5.5 Calculation of the Static Positioning Error, Reversal Error, Repeatability and Accuracy
70 7-5.6 Stroke of Axis
7-5.7 Nomenclature for Performance Metrics Calculated With Corrected Data
71 7-5.8 Linearity and Hysteresis
Figure 7-5.5-1 Example Mean Bidirectional Positioning Error and Calculation Results
72 7-5.9 Periodic Error of Linear Motion (Partial Travel)
73 Figure 7-5.8-1 Plot of Linearly Corrected (via Endpoint Linear Normalization) Positioning Deviations Illustrating the Calculation of Linearity of the Axis
74 7-5.10 Alternate Informative Methods
Figure 7-5.9.5-1 Plot of Calculated Positioning Deviations Illustrating the Periodic Error P of a Linear Axis
75 Figure 7-5.10.1-1 Step Test Cycle
76 7-5.11 Presentation of Results
7-6 CONSTANT VELOCITY AND ACCELERATION TEST
7-6.1 General
Table 7-5.10.2-1 First 40 Position Values Based on a Sobol Sequence Calculation
77 7-6.2 Method for Defining Measurement Targets
7-6.3 Measurement Setup
Figure 7-5.10.3-1 Example of Position Data Corrected for Drift
78 Figure 7-5.11-1 Example of a Static Positioning Error and Linearity Test Report
81 7-6.4 Measurement Procedure
7-6.5 Data Analysis
82 Figure 7-6.5.2-1 Example of a Velocity Profile for a Test Motion
83 Figure 7-6.5.2-2 Example of Velocity Settling for a Test Motion
86 7-7 DYNAMIC POSITIONING TESTS
7-7.1 General
7-7.2 Method for Defining Measurement Targets
87 Figure 7-6.5.3-1 Example of a Constant Velocity and Acceleration Test Report for a Single Motion
88 Figure 7-6.5.3-2 Example of Average Metrics for Constant Velocity and Acceleration Test Report
89 7-7.3 Measurement Setup
Figure 7-7.3.1-1 Laser Interferometer Example Setup
90 7-7.4 Measurement Procedure
7-7.5 Data Analysis
91 Figure 7-7.5.1-1 Linear Ramp Motion General Characteristics
Figure 7-7.5.2-1 Example Linear Ramp Motion and Dynamic Positioning Deviation for Three Control Configurations
92 7-7.6 Test Uncertainty Analysis
Figure 7-7.5.2-2 Zoomed-In Portion of Example Dynamic Positioning Deviation for Three Control Configurations for Linear Ramp Target Motion
93 Figure 7-7.5.2-3 Zoomed-In Portion of Example Dynamic Positioning Deviation Near the Final Target Position After t = 0.2 s
94 Figure 7-7.5.3-1 Sinusoidal Motion General Characteristics
95 Figure 7-7.5.4-1 Example Sinusoidal Motion and Dynamic Positioning Deviation for Two Control Configurations
Figure 7-7.5.4-2 Zoomed-In Portion of Example Dynamic Positioning Deviation for Two Control Configurations for Sinusoidal Target Motion
96 Figure 7-7.5.4-3 Example Sinusoidal Target Velocity and Target Acceleration for Two Control Configurations
97 7-7.7 Presentation of Results
98 Figure 7-7.7.1-1 Example of a Dynamic Positioning Test Report for a Linear Ramp Motion
99 Figure 7-7.7.2-1 Example of a Dynamic Positioning Test Report for a Sinusoidal Motion
101 Figure 7-7.7.2-2 Example of a Dynamic Velocity Test Report for a Sinusoidal Motion
102 Figure 7-7.7.2-3 Example of a Dynamic Acceleration Test Report for a Sinusoidal Motion
103 Section 8 Geometric Accuracy
8-1 STRAIGHTNESS ERRORS
8-1.1 General
8-1.2 Measurement Setup
104 Figure 8-1.1-1 Straightness Error Motions, EYX and EZX, of a Linear Positioning System Designed to Traverse in the X-Direction
Figure 8-1.2.2-1 Setups for Measuring Straightness Using a Displacement Sensor and a Straightedge With Either a Fixed-Sensor Measurement or a Moving-Sensor Measurement
105 8-1.3 Measurement Setup
Figure 8-1.2.2-2 Setup for Measuring Straightness Using a Straightness Interferometer With Either a Fixed-Sensor Measurement or a Moving-Sensor Measurement
106 8-1.4 Static Straightness Measurement Procedure
107 8-1.5 Static Straightness Data Analysis
8-1.6 Presentation of Static Results
8-1.7 Dynamic Straightness Measurement Procedure
108 Figure 8-1.6-1 Example of a Static Straightness Test Report
109 8-1.8 Dynamic Straightness Data Analysis
110 8-1.9 Presentation of Dynamic Results
8-2 ANGULAR ERRORS
8-2.1 General
8-2.2 Measurement Setup
8-2.3 Measurement Setup
111 Figure 8-1.9-1 Example of a Dynamic Straightness Test Report
112 Figure 8-2.1-1 Angular Error Motions, EAX, EBX, and ECX, of a Linear Positioning System Designed to Traverse in the X-Direction
113 8-2.4 Static Angular Measurement Procedure
8-2.5 Static Angle Data Analysis
114 8-2.6 Presentation of Static Results
8-2.7 Dynamic Angular Measurement Procedure
115 Figure 8-2.6-1 Example of a Static Angular Error Test Report
116 8-2.8 Dynamic Angle Data Analysis
8-2.9 Presentation of Dynamic Results
117 Figure 8-2.9-1 Example of a Dynamic Angular Error Report
118 Section 9 Point Repeatability Test
9-1 GENERAL
9-2 MEASUREMENT SETUP
9-2.1 General Measurement Setup
9-2.2 Equipment
119 9-2.3 Functional Point(s), Target position(s), and Sensor Location
9-2.4 Setup Configuration
120 Figure 9-2.3-1 The Four Possible Test Cases of the Point Repeatability Test Given the Options for Single or Multiple Functional Points and Target Positions
121 Figure 9-2.4-1 Setup Configuration — Three-Sensor Nest
Figure 9-2.4-2 Setup Configuration — Single Sensor
Figure 9-2.4-3 Setup Configuration —Two-Sensor Nest
122 9-2.5 Measurement Approach Direction(s)
9-2.6 Minimum Displacement
9-2.7 Axial Sensor — Special Cases
123 9-3 MEASUREMENT PROCEDURE
9-3.1 General Measurement Procedure
9-3.2 Number of Data Points and Sampling Rate
9-3.3 Data Collection Timing
124 9-4 DATA ANALYSIS
125 9-5 TEST UNCERTAINTY ANALYSIS
9-6 PRESENTATION OF RESULTS
127 Figure 9-6-1 Example of a Point Repeatability Test Report for a Linear Positioning System
128 Section 10 Servo Characterization
10-1 GENERAL
10-2 TECHNICAL BACKGROUND
10-2.1 Signals and Systems
10-2.2 Linearity and Time Invariance
129 10-2.3 Frequency Response
Figure 10-2.3-1 Lumped-Parameter Model of a Mass-Spring-Damper System Driven by a Force
130 10-2.4 Inputs and Outputs
10-2.5 Categorizing Frequency Responses
Figure 10-2.3-2 Frequency Response Plot for an Underdamped Mass-Spring-Damper System
131 Figure 10-2.5.1-1 Basic Control Scheme Used by Many Single-Axis Positioning Systems
132 10-3 FREQUENCY RESPONSE MEASUREMENTS
10-3.1 Equipment
10-3.2 Loop Transmission Measurement Procedure
Figure 10-3.2-1 Disturbance Signal, w, Injected Into a System Following the Control Algorithm but Before the Power Amplifier Stage
133 10-4 STABILITY METRICS
10-5 PRESENTATION OF RESULTS
10-6 SUMMARY
Table 10-3.2-1 Dynamic Signal Analyzer Test Parameters to Be Specified
134 Figure 10-4-1 Examples of the Measures on a Typical Loop Transmission Plot
135 Figure 10-5-1 Example of a Measured Loop Transmission for a Linear Motion System
Figure 10-5-2 Corresponding Sensitivity Plot for a Measured Loop Transmission for a Linear Motion System
136 Table 10-5-1 Values to Accompany a Typical Servomechanism Characterization Test
137 Section 11 Test Equipment and Instrumentation
11-1 GENERAL
138 11-2 EXISTING REFERENCES AND STANDARDS
11-3 LINEAR POSITION
11-3.1 Laser Interferometers
Table 11-3-1 Typical Position Sensor Characteristics
139 11-3.2 Linear Encoders
11-3.3 Linear Variable Displacement Transformers
Figure 11-3.1-1 Generic Laser Interferometer Setup for Axial Position Measurement
140 11-3.4 Capacitive Sensors
11-3.5 Eddy Current Sensors
Figure 11-3.2-1 Generic Linear Encoder Setup for Axial Position Measurement
141 11-4 ANGLE
11-4.1 Laser Interferometers
Figure 11-3.3-1 LVDT Schematic for Axial Position Measurement
142 11-4.2 Autocollimators
11-4.3 Electrolytic Inclinometers
Figure 11-4.1-1 Alternate Laser Interferometer Setups for Pitch or Yaw Angular Displacement Measurement
Table 11-4-1 Typical Angle Sensor Characteristics
143 11-4.4 Servo Tiltmeters
11-4.5 MEMS Inclinometer
11-4.6 Position Sensing Detector Sensor
Figure 11-4.2-1 Autocollimator Setup for Angular Displacement Measurement
144 11-5 TEMPERATURE
11-6 BAROMETRIC PRESSURE
145 11-7 HUMIDITY
11-8 REFRACTIVE INDEX OF AIR
11-9 VIBRATION
146 11-10 DATA ACQUISITION
11-10.1 Filters
11-10.2 Triggers
11-11 FIXTURING
147 Section 12 Uncertainty
12-1 GENERAL
12-2 RATED OPERATING CONDITIONS
12-3 TEST CONDITIONS
12-4 MEASURAND AND UNCERTAINTY
148 12-5 MEASUREMENT REPRODUCIBILITY
12-6 EXAMPLE SOURCES OF UNCERTAINTY
12-6.1 Reference Artifact
12-6.2 Misalignment of Measuring System (Cosine Error)
12-6.3 Temperature
12-6.4 Other Properties of Air
149 12-6.5 Vibration
12-6.6 Resolution
12-6.7 Uncertainty of RMS Value
150 MANDATORY APPENDIX I MEASUREMENT POINT TO FUNCTIONAL POINT ERROR TRANSFORMATION
I-1 GENERAL
I-2 DISPLACEMENT ERROR TRANSFORMATION (POSITION AND STRAIGHTNESS)
151 I-3 PROPAGATION OF ERROR UNCERTAINTY
152 Figure I-2-1 Relationship of Vectors Between Physically Related Points Under Consideration: oF (Reference Coordinate System), M and P (Carriage)
Figure I-2-2 Associated Coordinate Systems for Fixed Points oF, M, and P
153 Figure I-2-3 Separation of Related Position Vectors Into System Nominal Positioning (X→), Initial Offsets (MX→), and Displacement Error Vectors (EM→ and EP→) (Combining Positioning and Straightness Deviations)
154 MANDATORY APPENDIX II ISOLATED SENSOR CHECK
II-1 GENERAL
II-2 MEASUREMENT SETUP
II-2.1 Short-Range Displacement Sensors
II-2.2 Autocollimators
II-2.3 Laser Interferometry Systems
155 Figure II-2.1-1 Schematics of Several Displacement Sensors With Capture Fixtures
II-3 MEASUREMENT PROCEDURE
156 Figure II-2.3.1-1 Setup for Measuring Influence of Laser Interferometer Optics
Figure II-2.3.2-1 Setup for Measuring Influence of Laser Interferometer System
157 MANDATORY APPENDIX III SPECIFICATIONS FOR OPERATING CONDITIONS AND PERFORMANCE
III-1 GENERAL
III-2 GENERAL SPECIFICATIONS FOR SINGLE-AXIS LINEAR POSITIONING SYSTEM
III-3 ENVIRONMENTAL SPECIFICATIONS FOR RATED OPERATING CONDITIONS
III-3.1 Temperature
158 III-3.2 Ambient Air
III-3.3 Electrical (Per Each Electrical Supply)
III-3.4 Ambient Vibration
III-3.5 Utility Air (if Applicable)
III-4 SPECIFICATIONS FOR MACHINE PERFORMANCE
III-4.1 General Test Conditions
159 III-4.2 In-Position Jitter Test (See Subsection 7-2)
III-4.3 Move and Settle Test (See Subsection 7-3)
III-4.4 Incremental Step Test and Minimum Incremental Motion Test (See Subsection 7-4)
III-4.5 Static Positioning Accuracy and Repeatability (See Subsection 7-5)
160 III-4.6 Constant Velocity and Acceleration Test (See Subsection 7-6)
III-4.7 Dynamic Positioning Accuracy Tests (See Subsection 7-7)
III-4.8 Straightness Errors (See Subsection 8-1)
161 III-4.9 Angular Errors (See Subsection 8-2)
III-4.10 Point Repeatability Test (See Section 9)
162 III-4.11 Servo Characterization (See Section 10)

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ASME B5.64 2022
$98.04