ASTM-E1162:1996 Edition

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E1162-87(1996) Standard Practice for Reporting Sputter Depth Profile Data in Secondary Ion Mass Spectrometry (SIMS)

Published By	Publication Date	Number of Pages
ASTM	1996	3

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Description

ASTM E1162-87-Reapproved1996

Historical Standard: Standard Practice for Reporting Sputter Depth Profile Data in Secondary Ion Mass Spectrometry (SIMS)

ASTM E1162

Scope

1.1 This practice covers the information needed to describe and report instrumentation, specimen parameters, experimental conditions, and data reduction procedures. SIMS sputter depth profiles can be obtained using a wide variety of primary beam excitation conditions, mass analysis, data acquisition, and processing techniques (1-4).

1.2 Limitations—This practice is limited to conventional sputter depth profiles in which information is averaged over the analyzed area in the plane of the specimen. Ion microprobe or microscope techniques permitting lateral spatial resolution of secondary ions within the analyzed area, for example, image depth profiling, are excluded.

1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Keywords

data analysis-spectrochemical; depth profiling; secondary ion mass spectrometry (SIMS); spectrometry-mass; sputter depth profiling data; surface analysis-spectrochemical analysis

ICS Code

ICS Number Code n/a

DOI: 10.1520/E1162-87R96

Additional information

Standard Title	E1162-87(1996) Standard Practice for Reporting Sputter Depth Profile Data in Secondary Ion Mass Spectrometry (SIMS)
Published Code	ASTM
Publication Date	1996
Pages Count	3