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ASTM-E2090 2006

$44.96

E2090-06 Standard Test Method for Size-Differentiated Counting of Particles and Fibers Released from Cleanroom Wipers Using Optical and Scanning Electron Microscopy

Published By Publication Date Number of Pages
ASTM 2006 11
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1.1 This test method covers testing all wipers used in cleanrooms and other controlled environments for characteristics related to particulate cleanliness.

1.2 This test method includes the use of computer-based image analysis and counting hardware and software for the counting of densely particle-laden filters (see ). While the use of this equipment is not absolutely necessary, it is strongly recommended to enhance the accuracy, speed, and consistency of counting.

1.3 The values stated in SI units are to be regarded as the standard.

This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

PDF Catalog

PDF Pages PDF Title
2 Scope
Referenced Documents
Terminology
Summary of Test Method
Significance and Use
Apparatus
3 Materials
Preparation of Apparatus
Calibration and Standardization
Procedure
4 FIG. 1
FIG. 2
5 FIG. 3
6 FIG. 4
7 FIG. 5
8 Calculation
9 Report
Precision and Bias
Keywords
10 X1. STATISTICAL REQUIREMENTS FOR SEM PARTICLE COUNTING FOR WIPER SUBSTRATES
X1.1
X1.2
X1.3
X2. PARTICLE/FIBER COUNTING DATA SHEET
11 FIG. X2.1
ASTM-E2090 2006
$44.96