ASTM-E983 1999

$35.75

E983-94(1999) Standard Guide for Minimizing Unwanted Electron Beam Effects in Auger Electron Spectroscopy

Published By	Publication Date	Number of Pages
ASTM	1999	4

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Categories: 17.180.30 - Optical measuring instruments, ASTM

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Description

ASTM E983-94-Reapproved1999

Historical Standard: Standard Guide for Minimizing Unwanted Electron Beam Effects in Auger Electron Spectroscopy

ASTM E983

Scope

1.1 This guide outlines the origins and manifestations of unwanted electron beam effects in Auger electron spectroscopy (AES).

1.2 Some general guidelines are provided concerning the electron beam parameters which are most likely to produce these effects.

1.3 General classes of materials are identified which are most likely to exhibit unwanted electron beam effects. In addition, a tabulation of some specific materials which have been observed to undergo electron damage effects is provided.

1.4 A simple method is outlined for establishing the existence and extent of these effects during routine AES analysis.

1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Keywords

Auger electron spectroscopy; charging; electron beam; electron beam damage

ICS Code

ICS Number Code 17.180.30 (Optical measuring instruments)

DOI:

Additional information

Standard Title	E983-94(1999) Standard Guide for Minimizing Unwanted Electron Beam Effects in Auger Electron Spectroscopy
Published Code	ASTM
Publication Date	1999
Pages Count	4
ICS Codes	17.180.30 - Optical measuring instruments