ASTM-F1152:2002 Edition

ASTM F1152

Scope

This standard was transferred to SEMI (www.semi.org) May 2003

1.1 This test method covers a nondestructive procedure to determine whether or not the dimensions of fiducial notches on silicon wafers fall within specified limits.

1.2 The values stated in SI units are to be regarded as the standard. The values given in parentheses are for information only.

1.3 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Keywords

notch; notch dimension; optical comparator; silicon; wafer

ICS Code

ICS Number Code 29.045 (Semiconducting materials)

DOI: 10.1520/F1152-02