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ASTM-F1367:2011 Edition

ASTM-F1367:2011 Edition

$35.75

F1367-98(2011) Standard Specification for Chromium Sputtering Targets for Thin Film Applications

Published By Publication Date Number of Pages
ASTM 2011 2
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1.1 This specification covers sputtering targets fabricated from chromium metal.

1.2 This specification sets purity grade levels, physical attributes, analytical methods and packaging requirements.

1.3 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.

PDF Catalog

PDF Pages PDF Title
1 Scope
Referenced Documents
Terminology
Classification
Ordering Information
Chemical Composition
Physical Properties
Dimensions, Mass, and Permissible Variations
TABLE 1
2 Workmanship, Finish and Appearance
Sampling
Analytical Methods
Certification
Product Marking
Packaging and Package Marking
Keywords
TABLE 2

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