ASTM-F24 2015

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F24-09(2015) Standard Test Method for Measuring and Counting Particulate Contamination on Surfaces

Published By	Publication Date	Number of Pages
ASTM	2015	4

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Categories: 17.040.20 - Properties of surfaces, ASTM

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ASTM F24-09-Reapproved2015

Historical Standard: Standard Test Method for Measuring and Counting Particulate Contamination on Surfaces

ASTM F24

Scope

1.1 This test method covers the size distribution analysis of particulate contamination, 5 μm or greater in size, either on, or washed from, the surface of small electron-device components. A maximum variation of two to one (±33 % of the average of two runs) should be expected for replicate counts on the same sample.

1.2 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.

Keywords

optical particle counting; particulate contamination; size distribution analysis; surfaces;

ICS Code

ICS Number Code 17.040.20 (Properties of surfaces)

DOI: 10.1520/F0024-09R15


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Standard Title	F24-09(2015) Standard Test Method for Measuring and Counting Particulate Contamination on Surfaces
Published Code	ASTM
Publication Date	2015
Pages Count	4
ICS Codes	17.040.20 - Properties of surfaces

ASTM-F24 2015

ASTM F24-09-Reapproved2015

Historical Standard: Standard Test Method for Measuring and Counting Particulate Contamination on Surfaces

ASTM F24

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