ASTM-F388 1984
$40.63
F388-84 Method for Measurement of Oxide Thickness on Silicon Wafers and Metallization Thickness by Multiple-Beam Interference (Tolansky Method) (Withdrawn 1993)
| Published By | Publication Date | Number of Pages |
| ASTM | 1984 |
ASTM F388-84
Withdrawn Standard: Method for Measurement of Oxide Thickness on Silicon Wafers and Metallization Thickness by Multiple-Beam Interference (Tolansky Method) (Withdrawn 1993)
ASTM F388
Scope
Keywords
ICS Code
ICS Number Code 29.045 (Semiconducting materials)
DOI:
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