ASTM-F816:2003 Edition

ASTM F816

Scope

1.1 This test method applies to hermetic package leak testing to detect leaks of a broad spectrum in size with a minimum detection level equal to the sensitivity of the helium mass spectrometer equipment used in the test.

1.2 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Keywords

helium leak check; hermetic packages; hybrid microcircuits

ICS Code

ICS Number Code n/a

DOI: 10.1520/F0816-83R03