ASTM-F928 1999

$35.75

F928-93(1999) Standard Test Methods for Edge Contour of Circular Semiconductor Wafers and Rigid Disk Substrates

Published By	Publication Date	Number of Pages
ASTM	1999	4

Guaranteed Safe Checkout

Category: ASTM

If you have any questions, feel free to reach out to our online customer service team by clicking on the bottom right corner. We’re here to assist you 24/7.
Email:[email protected]

Description

ASTM F928-93-Reapproved1999

Historical Standard: Standard Test Methods for Edge Contour of Circular Semiconductor Wafers and Rigid Disk Substrates

ASTM F928

Scope

1.1 These test methods provide means for examining the edge contour of circular wafers of silicon, gallium arsenide, and other electronic materials, and determining fit to limits of contour specified by a template that defines a permitted zone through which the contour must pass. Principal application of such a template is intended for, but not limited to, wafers that have been deliberately edge shaped.

1.2 Two test methods are described. One is destructive and is limited to inspection of discrete points on the periphery, including flats. The contour of deliberately edge-shaped wafers may not be uniform around the entire periphery, and thus the discrete location(s) may or may not be representative of the entire periphery. The other test method is nondestructive and suitable for inspection of all points on the wafers periphery except flats.

1.3 The nondestructive test method may also be applied to the examination of the edge contour of the outer periphery of substrates for rigid disks used for magnetic storage of data.

Note 1—Reference to wafers in the remainder of this standard shall be interpreted to include substrates for rigid disks unless the phrase “of electronic materials” is also included in the context.

1.4 The values stated in SI units are to be regarded as the standard. The values given in parentheses are for information only.

1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Keywords

contour; edge contour; gallium arsenide; optical comparator; projection microscope; rigid disk; semiconductor; silicon; wafer

ICS Code

ICS Number Code 29.045 (Semiconducting materials)

DOI: 10.1520/F0928-93R99

Additional information

Standard Title	F928-93(1999) Standard Test Methods for Edge Contour of Circular Semiconductor Wafers and Rigid Disk Substrates
Published Code	ASTM
Publication Date	1999
Pages Count	4