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BS EN ISO 14644-6:2007

BS EN ISO 14644-6:2007

$189.07

Cleanrooms and associated controlled environments – Vocabulary

Published By Publication Date Number of Pages
BSI 2007 48
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This part of ISO 14644 establishes a vocabulary of terms and definitions related to cleanrooms and associated controlled environments. This part of ISO 14644 is a compendium of the terms and definitions given in the other parts of ISO 14644. It also includes the terms and definitions given in ISO 14698-1 and ISO 14698-2.

BS EN ISO 14644-6:2007
$189.07