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BS IEC 60747-14-4:2011

$215.11

Semiconductor devices. Discrete devices – Semiconductor accelerometers

Published By Publication Date Number of Pages
BSI 2011 102
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IEC 60747-14-4:2011 applies to semiconductor accelerometers for all types of products. This standard applies not only to typical semiconductor accelerometers with built-in electric circuits, but also to semiconductor accelerometers accompanied by external circuits. This standard does not (or should not) violate (or interfere with) the agreement between customers and suppliers in terms of a new model or parameters for business. NOTE 1: This standard, although directed toward semiconductor accelerometers, may be applied in whole or in part to any mass produced type of accelerometer. NOTE 2: The purpose of this standard is to allow for a systematic description, which covers the subjects initiated by the advent of semiconductor accelerometers. The tasks imposed on the semiconductor accelerometers are not only common to all accelerometers but also inherent to them and not yet totally solved. The descriptions are based on latest research results. One typical example is the multi-axis accelerometer. This standard states the method of measuring acceleration as a vector quantity using multi-axis accelerometers. NOTE 3: This standard does not conflict in any way with any existing parts of either ISO 16063 or ISO 5347. This standard intends to provide the concepts and the procedures of calibration of the semiconductor multi-axis accelerometers which are used not only for the measurement of acceleration but also for the control of motion in the wide frequencies ranging from DC. This publication is to be read in conjunction with /2.

PDF Catalog

PDF Pages PDF Title
4 English

CONTENTS
7 FOREWORD
9 INTRODUCTION
10 1 Scope
2 Normative references
11 3 Terminology and letter symbols
3.1 Terms and definitions
17 3.2 Letter symbols
Tables

Table 1 – List of letter symbols
18 4 Essential ratings and characteristics
4.1 General
19 Figures

Figure 1 – Single axis accelerometer
Figure 2 – Multi-axis accelerometer
20 Figure 3 – Concept of the mathematical definition of accelerometers
Table 2 – Level of accelerometers and the definition
22 4.2 Ratings (limiting values)
4.3 Recommended operating conditions
23 4.4 Characteristics
25 5 Measuring methods
5.1 General
26 Table 3 – Test items and the recommended corresponding measurement methods
27 5.2 Testing methods for characteristics
Table 4 – Relation between recommended applicable calibration methods and type of accelerometers
30 Figure 4 – Concept of dynamic linearity of an accelerometer on gain
31 Figure 5 – Concept of dynamic linearity of an accelerometer on phase
35 Figure 6 – The semiconductor accelerometer as a system
36 Figure 7 – Example of the structure of assembled semiconductor accelerometer s
ystem for the concept of accelerometer frequency response
37 Figure 8 – Schematic diagram of frequency response measurement by electrical input
38 6 Acceptance and reliability
6.1 General
6.2 Environmental test
40 6.3 Reliability test
41 Annex A (informative)
Definition of sensitivity matrix of an accelerometer
48 Figure A.1 – Example of direction cosine
Table A.1 – Symbols for the relationship between input acceleration and the output signal from an accelerometer using one-dimensional vibration table
49 Table A.2 – Symbols for input acceleration and output signals from an accelerometer
Table A.3 – Definition of symbols for describing the input acceleration, output signal from the target accelerometer and the direction cosine repeated three times
51 Table A.4 – Relationship between the expression of transfer function in a matrix form and the number of axis of the target accelerometers
55 Figure A.2 – Accelerometers or pick-offs assembled in a normal co-ordinate system (top figure) and the acceleration component projection to the three co-ordinate axis plains, XY, YZ and ZX (bottom figure)
59 Table A.5 – Definition of vector space related to the generalization of the transverse sensitivity using the vector space concept
61 Table A.6 – Relation between input acceleration and output signal for the calibration, using the six-dimensional vibration table
77 Table A.7 – Normal sensitivities, explicit cross-sensitivities and implicit cross-sensitivities obtained by the calibration carried out in the application acceleration vector space with three dimensions
78 Table A.8 – Normal sensitivities, explicit cross-sensitivities and implicit cross-sensitivities obtained by the calibration carried out in the application acceleration vector space with six dimensions
79 Table A.9 – List of symbols in terms of measurement uncertainty using an accelerometer with M output axis assuming that N is larger than M
81 Annex B (informative)
Dynamic linearity measurement using an impact acceleration generator
Table B.1 – Dynamic linearity when both input and output are vector quantities
82 Table B.2 – Relations between the direction cosine of the input acceleration to one-axis accelerometers and the signal from the output axis
83 Table B.3 – Relationship between the direction cosine of the input acceleration to one-axis accelerometers and the signal from the output axis
84 Table B.4 – Conditions on the direction cosine for dynamic linearity measurement
Table B.5 – Relations between the direction cosine of the input acceleration to two-axis accelerometers and the signal from the output axis
85 Table B.6 – Relations between the direction cosine of the input acceleration to two-axis accelerometers and the signal from the output axis
Table B.7 – Conditions on the direction cosine for the dynamic linearity measurement
86 Table B.8 – Relationship between the direction cosine of the input acceleration to three-axis accelerometers and the signal from the output axis
87 Table B.9 – Relations between the direction cosine of the input acceleration to three-axis accelerometers and the signal from the output axis
Table B.10 – Conditions on the direction cosine for dynamic linearity measurement
88 Figure B.1 – Set-up for dynamic linearity measurement
90 Annex C (informative)
Measurement of peak sensitivity
Figure C.1 – Peak sensitivity as a function of each frequency bandwidth from DC to fn
Table C.1 – Definition of elements in one-axis accelerometer peak sensitivity
91 Table C.2 – Peak sensitivity of one-axis accelerometer
Table C.3 – Relationship of direction cosine and the co-ordinate system of the target accelerometer
93 Table C.4 – Definition of elements in two-axis accelerometer peak sensitivity
95 Table C.5 – Definition of elements in three-axis accelerometer peak sensitivity
98 Figure C.2 – Set-up for the control of frequency bandwidth of shock acceleration
99 Bibliography
BS IEC 60747-14-4:2011
$215.11