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BS ISO 18114:2021 – TC

$112.35

Tracked Changes. Surface chemical analysis. Secondary-ion mass spectrometry. Determination of relative sensitivity factors from ion-implanted reference materials

Published By Publication Date Number of Pages
BSI 2021 36
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This document specifies a method of determining relative sensitivity factors (RSFs) for secondary-ion mass spectrometry (SIMS) from ion-implanted reference materials.

The method is applicable to specimens in which the matrix is of uniform chemical composition, and in which the peak concentration of the implanted species does not exceed one atomic percent.

PDF Catalog

PDF Pages PDF Title
24 National foreword
28 Foreword
29 Introduction
31 1 Scope
2 Normative references
3 Terms and definitions
4 Symbols and abbreviated terms
32 5 Principle
6 Apparatus
7 Ion-implanted reference materials
8 Procedure
33 9 Test report
34 Bibliography
BS ISO 18114:2021 - TC
$112.35