BS ISO 20341:2003
$86.31
Surface chemical analysis. Secondary-ion mass spectrometry. Method for estimating depth resolution parameters with multiple delta-layer reference materials
| Published By | Publication Date | Number of Pages |
| BSI | 2003 | 14 |
This part of ISO 3262 specifies the requirements and the corresponding methods of test for natural quartz (ground).
PDF Catalog
| PDF Pages | PDF Title |
|---|---|
| 3 | TitlePage – Surface chemical analysis�— Secondary- ion mass spectrometry�— Method for estimating … |
| 5 | TableofContent – Contents Page |
| 6 | Foreword – Foreword |
| 7 | Introduction – Introduction |
| 9 | Scope – 1��� Scope UntitledSubclause2 – 1.1��� This International Standard UntitledSubclause2 – 1.2��� This International Standard NormativeReference – 2��� Normative references Clause1 – 3��� Symbols Clause1 – 4��� Requirements for multiple delta-layer reference materials UntitledSubclause2 – 4.1��� Ideal delta-layers have single atomic layer thickness according to th… UntitledSubclause2 – 4.2��� The matrix of sputtered surface layers shall not change during SIMS d… |
| 10 | UntitledSubclause2 – 4.3��� The surface and the delta-layers shall be flat and parallel to each o… UntitledSubclause2 – 4.4��� The thickness of the doped delta-layers shall be sufficiently less th… UntitledSubclause2 – 4.5��� The spacing between adjacent delta-layers shall be large enough so th… UntitledSubclause2 – 4.6��� The thickness, the position and the interface roughness of the delta-… Clause1 – 5��� Procedures UntitledSubclause2 – 5.1��� For adjustment and optimization of the secondary-ion mass spectromete… UntitledSubclause2 – 5.2��� For the use of UntitledSubclause2 – 5.3��� Before estimating the SIMS depth resolution parameters, if the backgr… |
| 11 | UntitledSubclause2 – 5.4��� To estimate the decay lengths and the Gaussian broadening, non-linear… Clause1 – 6��� Test report |
| 12 | AnnexNormative – Simpler options of estimating SIMS depth resolution parameters Clause1 – A.1��� General Clause1 – A.2��� Procedure |
| 13 | Bibliography – Bibliography |
