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BS ISO 5618-2:2024

BS ISO 5618-2:2024

$167.15

Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for GaN crystal surface defects – Method for determining etch pit density

Published By Publication Date Number of Pages
BSI 2024 34
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PDF Catalog

PDF Pages PDF Title
2 undefined
6 Foreword
7 Introduction
9 1 Scope
2 Normative references
3 Terms and definitions
11 4 Principle
5 Definition of substrate in-plane position
6 Procedures for forming an etch pit
6.1 Pre-treatment of a sample
12 6.2 Etching process
6.3 Washing
13 7 Method of capturing an etch pit image
7.1 Setting the observation conditions for an optical microscope
7.1.1 Objective lens
7.1.2 Image resolution
14 7.1.3 Measurement area
7.1.4 Measurement points
15 7.2 Capturing an etch pit image by using an optical microscope
8 Method of calculating the etch pit density
8.1 Etch pit counting criteria
8.1.1 Counting targets
8.1.2 Counting criteria
16 8.2 Counting etch pits
8.3 Method of calculating the etch pit density
17 8.4 Method of calculating the coefficient of variation for the etch pit density
9 Categorising the inverted hexagonal pyramidal etch pits by size and calculating their percentages
9.1 Judging whether inverted hexagonal pyramidal pits can be categorized by size
9.2 Principle of categorizing dislocations by inverted hexagonal pyramidal pit size
18 9.3 Determining the inverted hexagonal pyramidal pit sizes
9.4 Creating a histogram for the inverted hexagonal pyramidal pit sizes
9.4.1 Setting data sections
9.4.2 Generating a histogram
19 9.5 Analysing a histogram
9.5.1 Method of analysing a histogram
20 9.5.2 Number of inverted hexagonal pyramidal pit size levels
9.5.3 Inverted hexagonal pyramidal pit size levels
21 9.5.4 Method of calculating the percentage of an inverted hexagonal pyramidal pit size level
10 Test report
22 Annex A (normative) Verification of dislocation detection by etching
25 Annex B (informative) Appropriate inverted hexagonal pyramidal pit size for etch pit counting
27 Annex C (normative) Measurement area
30 Annex D (normative) Measurement points
31 Annex E (normative) Verification of the classifying dislocations by etch pit size
33 Bibliography

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BS ISO 5618-2:2024
$167.15