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BSI 15/30291643 DC:2015 Edition

BSI 15/30291643 DC:2015 Edition

$13.70

BS ISO 18516. Surface chemical analysis. Determination of lateral resolution and sharpness in beam based methods

Published By Publication Date Number of Pages
BSI 2015 58
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Status

Definitive
Pages

58
Publication Date

2015-03-03
Standard Number

15/30291643 DC
Title

BS ISO 18516. Surface chemical analysis. Determination of lateral resolution and sharpness in beam based methods
Identical National Standard Of

ISO/DIS 18516
Descriptors

Straight, Auger electron spectroscopy, Surface chemistry, Photoelectron spectroscopy, Electron emission, Resolution, Spectroscopy, Surfaces, Dimensional measurement, Chemical analysis and testing, Side, Electron physics, X-ray photoelectron spectroscopy
Publisher

BSI
Committee

CII/60
ICS Codes 71.040.40 - Chemical analysis
BSI 15/30291643 DC
$13.70