BSI 21/30385921 DC:2021 Edition
$13.70
BS ISO 18115-3. Surface chemical analysis. Vocabulary – Part 3. Terms used in optical interface analysis
Published By | Publication Date | Number of Pages |
BSI | 2021 | 43 |
This International Standard defines terms for surface chemical analysis in the area of optical interface analysis including ellipsometry, Raman spectroscopy and nonlinear optical techniques as well as general optical terms. ISO 18115-1 covers general surface chemical analysis terms and those used in spectroscopy while ISO 18115-2 covers terms used in scanning-probe microscopy.