BSI 21/30432242 DC:2021 Edition
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BS IEC 62047-42. Semiconductor devices. Micro-electromechanical devices – Part 42. Measurement methods of electromechanical conversion characteristics of piezoelectric MEMS cantilever
Published By | Publication Date | Number of Pages |
BSI | 2021 | 22 |
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Status | Definitive |
---|---|
Pages | 22 |
Publication Date | 2021-07-09 |
Standard Number | 21/30432242 DC |
Title | BS IEC 62047-42. Semiconductor devices. Micro-electromechanical devices – Part 42. Measurement methods of electromechanical conversion characteristics of piezoelectric MEMS cantilever |
Identical National Standard Of | IEC 62047-42 ED1 |
Descriptors | Semiconductor technology, Electronic equipment and components, Semiconductor devices, Semiconductors, Semiconductor diodes, Semiconductor rectifiers, Semiconductor resistors |
Publisher | BSI |
Committee | EPL/47 |
ICS Codes | 31.080.99 - Other semiconductor devices |
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