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BSI 21/30432242 DC:2021 Edition

$13.70

BS IEC 62047-42. Semiconductor devices. Micro-electromechanical devices – Part 42. Measurement methods of electromechanical conversion characteristics of piezoelectric MEMS cantilever

Published By Publication Date Number of Pages
BSI 2021 22
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Status

Definitive

Pages

22

Publication Date

2021-07-09

Standard Number

21/30432242 DC

Title

BS IEC 62047-42. Semiconductor devices. Micro-electromechanical devices – Part 42. Measurement methods of electromechanical conversion characteristics of piezoelectric MEMS cantilever

Identical National Standard Of

IEC 62047-42 ED1

Descriptors

Semiconductor technology, Electronic equipment and components, Semiconductor devices, Semiconductors, Semiconductor diodes, Semiconductor rectifiers, Semiconductor resistors

Publisher

BSI

Committee

EPL/47

ICS Codes 31.080.99 - Other semiconductor devices
BSI 21/30432242 DC
$13.70