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BSI 22/30449834 DC 2022

BSI 22/30449834 DC 2022

$13.70

BS ISO 21360-6. Vacuum technology. Standard methods for measuring vacuum-pump performance – Part 6. Cryo vacuum pumps

Published By Publication Date Number of Pages
BSI 2022 20
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PDF Catalog

PDF Pages PDF Title
6 Foreword
7 Introduction
9 1 Scope
2 Normative references
3 Terms and definitions
10 4 Symbols and abbreviated terms
11 5 Test methods
5.1 Test gas
5.2 Measurement of the volume flow rate (pumping speed)
5.2.1 General
5.2.2 Volume flow rate (pumping speed) measurement by the throughput method
5.2.3 Volume flow rate (pumping speed) measurement by the orifice method
5.2.4 Pretreatment procedure
5.2.5 Measurement of water vapor pumping speed
12 5.3 Maximum throughput measurement
5.3.1 General
5.3.2 Measurement method
5.3.3 Measurement setup
5.3.4 Measuring procedure
5.4 Pumping capacity measurement
5.4.1 General
5.4.2 Measurement setup
13 5.4.3 Measuring procedure
5.5 Measurement of base pressure
5.6 Measurement of cooldown time
5.6.1 General
5.6.2 Measurement setup
5.6.3 Measuring procedure
14 5.7 Measurement of crossover value
5.7.1 General
5.7.2 Measurement method
5.7.3 Measurement setup
16 5.7.4 Measuring procedure
6 Test report
6.1 Content
17 6.2 Report on pump parameters
6.3 Report on test equipment and conditions
6.4 Report on operational parameters
6.5 Report on pump performance
19 Annex€A (informative) The volume flow rate calculation for the water vapor
20 Bibliography

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BSI 22/30449834 DC 2022
$13.70