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BSI 24/30497109 DC:2024 Edition

BSI 24/30497109 DC:2024 Edition

$10.54

BS EN IEC 63068-5 Semiconductor devices. Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices – Part 5. Test method for defects using X-ray topography

Published By Publication Date Number of Pages
BSI 2024 32
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Status

Definitive
Pages

32
Publication Date

2024-07-12
Standard Number

24/30497109 DC
Title

BS EN IEC 63068-5 Semiconductor devices. Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices – Part 5. Test method for defects using X-ray topography
Descriptors

Semiconductor materials, Semiconductor technology, X-rays
Publisher

BSI
Committee

EPL/47
ICS Codes 31.080.99 - Other semiconductor devices

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