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BSI 24/30497113 DC:2024 Edition

BSI 24/30497113 DC:2024 Edition

$10.54

BS EN IEC 63567-1 Semiconductor devices. Performance evaluation of semiconductor processing components and inspection equipment – Part 1. Transmittance evaluation method of EUV pellicle

Published By Publication Date Number of Pages
BSI 2024 16
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Status

Definitive
Pages

16
Publication Date

2024-07-12
Standard Number

24/30497113 DC
Title

BS EN IEC 63567-1 Semiconductor devices. Performance evaluation of semiconductor processing components and inspection equipment – Part 1. Transmittance evaluation method of EUV pellicle
Publisher

BSI
Committee

EPL/47

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BSI 24/30497113 DC
$10.54