BSI PD IEC TR 63258:2021

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Nanotechnologies. A guideline for ellipsometry application to evaluate the thickness of nanoscale films

Published By	Publication Date	Number of Pages
BSI	2021	24

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IEC TR 63258:2021 is a Technical Report focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility.

PDF Catalog

PDF Pages	PDF Title
2	undefined
4	CONTENTS
5	FOREWORD
7	INTRODUCTION
8	1 Scope 2 Normative references 3 Terms and definitions 3.1 General terms
9	3.2 Terms specific to this document
10	4 Measurement of ellipsometry 4.1 General Figures Figure 1 – Primary structure of ellipsometry measurement
11	4.2 Measurement procedure 4.2.1 Sample preparation for system check 4.2.2 Experimental procedure for system check 4.2.3 Sample handling 4.2.4 Experimental procedures
12	5 Reporting data 6 Data analysis / interpretation of results 6.1 General
13	6.2 Setting analysis model Figure 2 – Flow chart of the ellipsometry data analysis
14	6.3 Data fitting and validation of analysis result 6.3.1 General
15	6.3.2 Data analysis method 1 – Dispersion law (Cauchy model) [6] 6.3.3 Data analysis method 2 – Sellmeier equation model (transparent material) [7] 6.3.4 Data analysis method 3 – Drude dispersion model (conductive material) [8], [9]
16	6.3.5 Data analysis method 4 – Dispersion law (classical model / Lorentz model) [8], [9]
17	6.3.6 Data analysis method 5 – Forouhi-Bloomer dispersion model [10], [11] 6.3.7 Data analysis method 6 – Tauc-Lorentz dispersion model (amorphous materials) [12], [13]
19	Annex A (informative)Case study: Interlaboratory comparison by using SiO2/Si samples Figure A.1 – An example of the report form of ellipsometry measurements
20	Figure A.2 – An example of the results of the interlaboratory comparison Figure A.3 – The wafer-shaped sample used for the interlaboratory comparison
21	Annex B (informative)Case study: Ellipsometry measurement of other materials
22	Bibliography