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BSI PD IEC TS 62607-5-3:2020

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Nanomanufacturing. Key control characteristics – Thin-film organic/nano electronic devices. Measurements of charge carrier concentration

Published By Publication Date Number of Pages
BSI 2020 24
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This part of IEC TS 62607, which is a Technical Specification, specifies sample structures for evaluating a wide range of charge carrier concentration in organic/nano materials. This specification is provided for both capacitance-voltage (C-V) measurements in metal/insulator/semiconductor stacking structures and Hall-effect measurements with the van der Pauw configuration. Criteria for choosing measurement methods of charge carrier concentration in organic semiconductor layers are also given in this document.

PDF Catalog

PDF Pages PDF Title
2 undefined
4 CONTENTS
5 FOREWORD
7 INTRODUCTION
8 1 Scope
2 Normative references
3 Terms and definitions
4 Sample structures
4.1 Metal/insulator/semiconductor (MIS) structure
9 4.2 Thin-film specimens with the van der Pauw configuration
Figures
Figure 1 – Typical metal/insulator/semiconductor (MIS) structures
Figure 2 – An organic MIS structure favourable for capacitance-voltage measurements
10 5 Criteria for choosing a method for measuring carrier concentration in organic semiconductor layers
6 Appropriate data formats
Figure 3 – Sample structures for Hall-effect measurementwith the van der Pauw configuration
11 Table 1 – Possible data format to be given together withcarrier concentrations obtained with capacitance-voltage measurements
Table 2 – Possible data format to be given together withcarrier concentrations obtained with the Hall-effect measurements
12 Annex A (informative)Case study of carrier concentration measurements of organic materials
A.1 Procedure of capacitance-voltage (C-V) measurement
Figure A.1 – Equivalent circuit model for capacitance-voltagemeasurement with MIS structure
13 A.2 Capacitance-voltage measurement for unoptimized pentacene MIS structures
Figure A.2 – Typical capacitance-voltage curves observedfor MIS structures with organic semiconductor films
14 Figure A.3 – Capacitance-voltage curves obtainedfor the MIS structure with 70-nm-thick-pentacene film
15 A.3 Influences of semiconductor layer thickness and electrode contact conditions on C-V measurements
16 A.4 Capacitance-voltage measurement for a pentacene MIS structure with an ultrathin insulator
18 Figure A.5 – Capacitance-voltage curves obtained for a pentaceneMIS structure with an ultrathin SAM-modified AlOx insulator
19 A.5 Procedure of Hall-effect measurement
20 A.6 Hall-effect measurement for organic semiconductor single-crystalline layers
21 Figure A.6 – Hall-effect measurement results for rubrenesingle-crystalline layer doped with ferric chloride
22 Bibliography
BSI PD IEC TS 62607-5-3:2020
$142.49