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BSI PD ISO/TR 14999-2:2019 – TC:2020 Edition

$280.87

Tracked Changes. Optics and photonics. Interferometric measurement of optical elements and optical systems – Measurement and evaluation techniques

Published By Publication Date Number of Pages
BSI 2020 162
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This document gives fundamental explanations to interferometric measurement objects, describes hardware aspects of interferometers and evaluation methods, and gives recommendations for test reports and calibration certificates.

PDF Catalog

PDF Pages PDF Title
92 undefined
97 Foreword
98 Introduction
99 1 Scope
2 Normative references
3 Terms and definitions
4 Measurement objects
4.1 Surfaces
4.1.1 Boundary surfaces of optical components
100 4.1.2 Reflection degree
4.1.3 Roughness
4.1.4 Topology of the regions (discontinuous regions)
4.1.5 Continuity of the surface; gradient of the surface
101 4.1.6 Stiffness of mirrors; finite-element-calculations
4.1.7 Temperature homogeneity of mirrors
4.1.8 Examples of measurement objects
4.2 Optical components in transmission
4.2.1 Single-pass versus double-pass testing
4.2.2 Windows (wavefront aberrations in transmission)
4.2.3 Prisms (wavefront aberrations and angle error)
4.2.4 Influence of temperature on the refractive index
102 4.3 Optical systems
4.3.1 Single-pass versus double-pass testing
4.3.2 Examination in the pupil
4.3.3 Chromatic aberrations
4.4 Indirect examination of the function of optical elements
4.4.1 Examination with different wavelengths
4.4.2 Examination with different beam paths
4.4.3 Tolerance range
5 Hardware aspects of an interferometer and test environment
5.1 General
104 5.2 Construction principles and influences on the quality of measurements
5.2.1 General
105 5.2.2 Intrinsic instrument errors and the principle of common path
106 5.2.3 Optical compensation of errors
107 5.2.4 Mathematical compensation of errors
108 5.2.5 Contrast as a function of the irradiance in test and reference arm: methods to attain equilibrium in both arms
112 5.2.6 Contrast as a function of performance of the light source
114 5.3 Test environment
5.3.1 General
115 5.3.2 Influence of vibrations
116 5.3.3 Influence of gravity and support of the test piece
118 6 Methods for evaluating the optical path difference
6.1 General
6.2 Visual inspection of interferograms
6.2.1 General
6.2.2 Example 1 — Fizeau interferometer
122 6.2.3 Example 2 — Twyman-Green interferometer
124 6.3 Manual evaluation of interferograms
126 6.4 Phase measurements with temporal carrier
6.4.1 General
127 6.4.2 Heterodyne interferometry
128 6.4.3 Phase lock interferometry (PLI)
6.4.4 Synchronous detection and phase-shifting interferometry
132 6.5 Phase measurements with spatial carrier
6.5.1 Fringe analysis by Fourier transform operations
133 6.5.2 Spatially synchronous fringe analysis
135 6.6 Removal of phase ambiguities (phase unwrapping)
136 6.7 Registration of wavefronts; coordinate systems, coordinate system definition
137 6.8 Polynomial and other representations of wavefronts
6.8.1 Representation of phase data
138 6.8.2 Zernike polynomials for a circular boundary
6.8.3 Use of Zernike polynomials for an elliptical boundary
139 6.8.4 Zernike-Tatian polynomials for a circular shape with a central hole (annular)
6.8.5 Legendre polynomials for a rectangle boundary
6.8.6 Orthogonal functions on “unusual areas”
7 Test reports and calibration certificates
7.1 General
140 7.2 Content of test reports and calibration certificates
7.3 Test reports
141 7.4 Calibration certificates
7.4.1 Basics
7.4.2 Specification
7.4.3 Adjustment or repair
7.5 Opinions and interpretations
7.6 Electronic transmission of results
142 7.7 Format of reports and certificates
7.8 Amendments to test reports and calibration certificates
8 Data format
143 Annex A (informative) Orthogonal polynomials
160 Bibliography
BSI PD ISO/TR 14999-2:2019 - TC
$280.87