BSI PD ISO/TR 14999-2:2019 – TC:2020 Edition
$280.87
Tracked Changes. Optics and photonics. Interferometric measurement of optical elements and optical systems – Measurement and evaluation techniques
Published By | Publication Date | Number of Pages |
BSI | 2020 | 162 |
This document gives fundamental explanations to interferometric measurement objects, describes hardware aspects of interferometers and evaluation methods, and gives recommendations for test reports and calibration certificates.
PDF Catalog
PDF Pages | PDF Title |
---|---|
92 | undefined |
97 | Foreword |
98 | Introduction |
99 | 1 Scope 2 Normative references 3 Terms and definitions 4 Measurement objects 4.1 Surfaces 4.1.1 Boundary surfaces of optical components |
100 | 4.1.2 Reflection degree 4.1.3 Roughness 4.1.4 Topology of the regions (discontinuous regions) 4.1.5 Continuity of the surface; gradient of the surface |
101 | 4.1.6 Stiffness of mirrors; finite-element-calculations 4.1.7 Temperature homogeneity of mirrors 4.1.8 Examples of measurement objects 4.2 Optical components in transmission 4.2.1 Single-pass versus double-pass testing 4.2.2 Windows (wavefront aberrations in transmission) 4.2.3 Prisms (wavefront aberrations and angle error) 4.2.4 Influence of temperature on the refractive index |
102 | 4.3 Optical systems 4.3.1 Single-pass versus double-pass testing 4.3.2 Examination in the pupil 4.3.3 Chromatic aberrations 4.4 Indirect examination of the function of optical elements 4.4.1 Examination with different wavelengths 4.4.2 Examination with different beam paths 4.4.3 Tolerance range 5 Hardware aspects of an interferometer and test environment 5.1 General |
104 | 5.2 Construction principles and influences on the quality of measurements 5.2.1 General |
105 | 5.2.2 Intrinsic instrument errors and the principle of common path |
106 | 5.2.3 Optical compensation of errors |
107 | 5.2.4 Mathematical compensation of errors |
108 | 5.2.5 Contrast as a function of the irradiance in test and reference arm: methods to attain equilibrium in both arms |
112 | 5.2.6 Contrast as a function of performance of the light source |
114 | 5.3 Test environment 5.3.1 General |
115 | 5.3.2 Influence of vibrations |
116 | 5.3.3 Influence of gravity and support of the test piece |
118 | 6 Methods for evaluating the optical path difference 6.1 General 6.2 Visual inspection of interferograms 6.2.1 General 6.2.2 Example 1 — Fizeau interferometer |
122 | 6.2.3 Example 2 — Twyman-Green interferometer |
124 | 6.3 Manual evaluation of interferograms |
126 | 6.4 Phase measurements with temporal carrier 6.4.1 General |
127 | 6.4.2 Heterodyne interferometry |
128 | 6.4.3 Phase lock interferometry (PLI) 6.4.4 Synchronous detection and phase-shifting interferometry |
132 | 6.5 Phase measurements with spatial carrier 6.5.1 Fringe analysis by Fourier transform operations |
133 | 6.5.2 Spatially synchronous fringe analysis |
135 | 6.6 Removal of phase ambiguities (phase unwrapping) |
136 | 6.7 Registration of wavefronts; coordinate systems, coordinate system definition |
137 | 6.8 Polynomial and other representations of wavefronts 6.8.1 Representation of phase data |
138 | 6.8.2 Zernike polynomials for a circular boundary 6.8.3 Use of Zernike polynomials for an elliptical boundary |
139 | 6.8.4 Zernike-Tatian polynomials for a circular shape with a central hole (annular) 6.8.5 Legendre polynomials for a rectangle boundary 6.8.6 Orthogonal functions on “unusual areas” 7 Test reports and calibration certificates 7.1 General |
140 | 7.2 Content of test reports and calibration certificates 7.3 Test reports |
141 | 7.4 Calibration certificates 7.4.1 Basics 7.4.2 Specification 7.4.3 Adjustment or repair 7.5 Opinions and interpretations 7.6 Electronic transmission of results |
142 | 7.7 Format of reports and certificates 7.8 Amendments to test reports and calibration certificates 8 Data format |
143 | Annex A (informative) Orthogonal polynomials |
160 | Bibliography |