ISO 15632:2021

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Microbeam analysis — Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers (EDS) for use with a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA)

Published By	Publication Date	Number of Pages
ISO	2021-02	20

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Categories: 71.040.99 - Other standards related to analytical chemistry, ISO

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Description

This document defines the most important quantities that characterize an energy-dispersive X-ray spectrometer consisting of a semiconductor detector, a pre-amplifier and a signal-processing unit as the essential parts. This document is only applicable to spectrometers with semiconductor detectors operating on the principle of solid-state ionization. This document specifies minimum requirements and how relevant instrumental performance parameters are to be checked for such spectrometers attached to a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA). The procedure used for the actual analysis is outlined in ISO 22309^[2] and ASTM E1508^[3] and is outside the scope of this document.

Additional information

Published Code	ISO
Published By	International Organization for Standardization
Publication Date	2021-02
Pages Count	20
Language	English
Edition	3
File Size	1.2 MB
ICS Codes	71.040.99 - Other standards related to analytical chemistry

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ISO 15632:2021

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