ISO 22493:2014

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Microbeam analysis — Scanning electron microscopy — Vocabulary

Published By	Publication Date	Number of Pages
ISO	2014-04	28

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Categories: 01.040.37 - Image technology (Vocabularies), 37.020 - Optical equipment, ISO

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Description

ISO 22493:2014 defines terms used in the practice of scanning electron microscopy (SEM). It covers both general and specific concepts, classified according to their hierarchy in a systematic order, with those terms that have already been defined in ISO 23833 also included, where appropriate.

ISO 22493:2014is applicable to all standardization documents relevant to the practice of SEM. In addition, some clauses of ISO 22493:2014 are applicable to documents relevant to related fields (e.g. EPMA, AEM, EDS) for the definition of terms which are relevant to such fields.

Additional information

Published Code	ISO
Published By	International Organization for Standardization
Publication Date	2014-04
Pages Count	28
Language	English
Edition	2
File Size	409.6 KB
ICS Codes	01.040.37 - Image technology (Vocabularies) 37.020 - Optical equipment

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ISO 22493:2014

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