ISO 23131:2021
$27.95
Ellipsometry — Principles
| Published By | Publication Date | Number of Pages |
| ISO | 2021-04 | 22 |
This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories.
It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3.
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