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JIS B 9920-2:2019

JIS B 9920-2:2019

$25.35

Cleanrooms and associated controlled environments – Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration

Published By Publication Date Number of Pages
JIS 2019-03-20 21
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This Standard describes the monitoring to assure that a cleanroom or clean zone performs and maintains the required control of air cleanliness by particle concentration.

Also, this Standard specifies minimum requirements for a monitoring plan for cleanroom or clean zone performance related to air cleanliness by particle concentration, based upon parameters that measure or affect airborne particle concentration.

This Standard does not address condition monitoring of aspects such as vibration or general maintenance of the engineering systems.

Also, this Standard does not cover the monitoring of ultrafine particles (particles smaller than 0.1 µm) that are outside the specified lower threshold particle-size range (0.1 µm to 5 µm).

NOTE The International Standard corresponding to this Standard and the symbol of degree of correspondence are as follows.

ISO 14644-2:2015 Cleanrooms and associated controlled environments—Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration (MOD)

In addition, symbols which denote the degree of correspondence in the contents between the relevant International Standards and JIS are IDT (identical), MOD (modified), and NEQ (not equivalent) according to ISO/IEC Guide 21-1.

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JIS B 9920-2:2019
$25.35