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JIS C 2162:2010

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Test method of long-term reliability of gate insulator for SiC devices at high temperature

Published By Publication Date Number of Pages
JIS 2010-03-23 14
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This Japanese Industrial Standard specifies the matters related to the "long-term reliability test of gate insulator for silicon carbide (SiC) devices at high temperature" (hereafter referred to as the "long-term reliability test"), namely, the test apparatus used, the structure of a sample, the method for eliminating the effect of defects in an SiC substrate and the test procedure.

JIS C 2162:2010
$16.90