JIS K 0148:2005
$20.15
Surface chemical analysis – Determination of surface elemental contamination on silicon wafers by total-reflection X-ray florescence (TXRF) spectroscopy
| Published By | Publication Date | Number of Pages |
| JIS | 2005-03-20 | 31 |
| Published Code | JIS |
|---|---|
| Published By | Japanese Industrial Standards |
| Publication Date | 2005-03-20 |
| Pages Count | 31 |
| Language | English |
| File Size | 1.4 MB |
| ICS Codes | 71.040 - Analytical chemistry |
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