NFPA 318 12:2012 Edition

$80.71

NFPA 318: Standard for the Protection of Semiconductor Fabrication Facilities

Published By	Publication Date	Number of Pages
NFPA	2012	36

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Category: NFPA

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Description

Safeguard people and property in semiconductor plants and research facilities with the 2012 NFPA 318. Up-to-date with the latest references to NFPA® codes and other documents, NFPA 318: Standard for the Protection of Semiconductor Fabrication Facilities applies to semiconductor fabrication facilities and comparable R&D areas in which hazardous chemicals are used, stored, and handled — containing a cleanroom or clean zone or both. Chapters cover core topics including: Fire protection Ventilation and exhaust systems Construction Chemical storage and handling Hazardous gas cylinder storage and distribution Bulk silane systems Production and support equipment Emergency control station General safety precautions Means of egress Three annexes provide helpful explanatory material; additional facts about seismic protection, and production and support equipment; and informational references. Facility engineers, owners, and managers, plant safety directors, safety trainers, risk insurers, and AHJs need the latest requirements for semiconductor fabrication facilities based on industry needs, new technology, and recent experience.

PDF Catalog

PDF Pages	PDF Title
2	Important Notices and Disclaimers
3	Additional Notices and Disclaimers
4	2.1 General 2.2 NFPA Publications
7	Chapter 1 Administration 1.1 Scope 1.2 Purpose 1.3 Retroactivity 1.4 Equivalency 1.5 Units Chapter 2 Referenced Publications
8	2.3 Other Publications 2.4 References for Extracts in Mandatory Sections Chapter 3 Definitions 3.1 General 3.2 NFPA Official Definitions 3.3 General Definitions
10	Chapter 4 Fire Protection 4.1 Automatic Fire-Extinguishing Systems 4.2 Alarm Systems
11	4.3 Detection Systems Chapter 5 Ventilation and Exhaust Systems 5.1 Air Supply and Recirculation Systems 5.2 Local Hazardous Chemical Exhaust System 5.3 Local Hazardous Chemical Exhaust System Construction
12	5.4 General Conditions 5.5 Hazardous Chemical Exhaust Duct Airflow and Dilution 5.6 Hazardous Chemical Exhaust Controls Chapter 6 Construction 6.1 Classification of Occupancy 6.2 Noncombustible Construction Components 6.3 Fire Resistance Rating 6.4 Electrical Classification 6.5 Emergency Power System 6.6 Occupied Levels of Fabrication Areas 6.7 Pass-Throughs in Existing Exit Access Corridors 6.8 Fabrication Areas 6.9 Vertical Openings
13	Chapter 7 Chemical Storage and Handling 7.1 Hazardous Chemicals
16	7.2 Flammable and Combustible Liquid Delivery Systems 7.3 Container Delivery 7.4 Liquid Waste Disposal 7.5 Spill Protection
17	7.6 Supply Piping 7.7 Welding 7.8 Pyrophoric Liquids Chapter 8 Hazardous Gas Cylinder Storage and Distribution 8.1 Packaging 8.2 Transport to the Semiconductor Facility 8.3 Distribution Systems
18	8.4 Silane and Silane/Nontoxic Mixes Storage and Dispensing Areas 8.5 Silane/Toxic Mixes Storage and Dispensing Areas
19	8.6 Flammable or Toxic Gases
20	8.7 Vent Headers 8.8 Training 8.9 Treatment Systems. Chapter 9 Bulk Silane Systems 9.1 Tube Trailer Systems
21	9.2 Cylinder Pack Systems and 450 L (119 gal) Cylinders Chapter 10 Production and Support Equipment 10.1 General 10.2 Interlocks 10.3 Electrical Design 10.4 Process Liquid Heating Equipment
22	10.5 Materials of Construction 10.6 Vacuum Pumps 10.7 Hazardous Gas Delivery Systems 10.8 Tools Using Flammable or Combustible Chemicals 10.9 Gas-Detection Systems
23	10.10 Emergency Alarm System Chapter 11 Emergency Control Station 11.1 Emergency Control Station Chapter 12 General Safety Precautions 12.1 Emergency Plan 12.2 Emergency Response Team 12.3 Emergency Drills Chapter 13 Means of Egress 13.1 Means of Egress 13.2 Service Corridors
24	Annex A Explanatory Material
28	Annex B Seismic Protection Annex C Production and Support Equipment
29	Annex D Informational References
31	Index
33	Formal Interpretation