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NFPA 318 2022

NFPA 318 2022

$80.71

NFPA 318: Standard for the Protection of Semiconductor Fabrication Facilities

Published By Publication Date Number of Pages
NFPA 2022 41
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Improve chemical safety and emergency response using the 2022 edition of NFPA 318, Standard for the Protection of Semiconductor Fabrication Facilities. The semiconductor industry continues to advance and new safeguards are required to address the ever-evolving hazards. NFPA 318, Standard for the Protection of Semiconductor Fabrication Facilities, applies to semiconductor fabrication facilities and comparable fabrication processes, including research and development (R&D) areas in which hazardous chemicals are used, stored, and handled and areas containing a cleanroom or clean zone. The chapters in this standard address every aspect of safety, from general precautions and fire protection to construction, chemical storage and handling, hazardous gas cylinder storage and distribution, bulk silane systems, production and support equipment, emergency control stations, and means of egress. The 2022 edition of NFPA 318, Standard for the Protection of Semiconductor Fabrication Facilities, can help all stakeholders involved in fire protection, including engineers, authorities having jurisdiction (AHJs), facility personnel, and contractors. Several revisions were made for the 2022 edition of the standard. Those changes include the following: Tables for hazardous material quantity limits have been updated to clarify aggregate limits and allowable increases, as well as to reflect quantities utilized in fabrication facilities. A new requirement has been added for cabinets storing pyrophoric liquids to be protected by a fire control system. New annex material has been added listing the fire control performance requirements for pyrophoric liquid fires. New language has been added allowing bulk gas purge sources to be used in place of purge cylinders if specific criteria are met. High-sensitivity smoke detection has been added as an option for silane delivery systems.

PDF Catalog

PDF Pages PDF Title
2 Important Notices and Disclaimers
3 Additional Important Notices and Disclaimers
8 Chapter 1 Administration
1.1 Scope.
1.2 Purpose.
1.3 Retroactivity.
1.4 Equivalency.
1.5 Units.
9 Chapter 2 Referenced Publications
2.1 General.
2.2 NFPA Publications.
2.3 Other Publications.
2.4 References for Extracts in Mandatory Sections.
10 Chapter 3 Definitions
3.1 General.
3.2 NFPA Official Definitions.
3.3 General Definitions.
12 Chapter 4 Building Construction and Related Services
4.1 General.
4.2 Classification of Occupancy.
4.3 Noncombustible Construction Components.
4.4 Fire Resistance Rating.
4.5 Pass-Throughs in Existing Exit Access Corridors.
4.6 Vertical Openings.
13 4.7 Air Supply and Recirculation Systems.
4.8 Electrical Classification.
4.9 Emergency Power System.
4.10 Means of Egress.
Chapter 5 Hazardous Materials — General Provisions
5.1 Hazardous Chemicals.
5.2 HPM Risk Assessment.
14 5.3 Container Delivery.
5.4 Storage and Handling of Hazardous Chemicals.
5.5 Separation of Hazardous Chemicals.
5.6 Systems, Equipment, and Processes.
15 5.7 Supply Piping.
17 5.8 Welding.
Chapter 6 Liquid Chemical Storage and Handling
6.1 General.
6.2 Flammable and Combustible Liquid Delivery Systems.
18 6.3 Spill Protection.
6.4 Pyrophoric Liquids.
19 6.5 Corrosive Liquids.
6.6 Toxic and Highly Toxic Materials.
6.7 Water Reactive Chemistries.
6.8 Oxidizers.
Chapter 7 Gas Storage and Handling
7.1 General.
21 7.2 Corrosive Gases.
7.3 Flammable Gases.
7.4 Oxidizing Gases.
7.5 Pyrophoric Gases.
7.6 Silane Systems.
7.7 Toxic and Highly Toxic Gases.
7.8 Unstable Reactive Gases.
7.9 Cryogenic Fluids.
7.10 Bulk Oxygen Systems.
7.11 Gaseous Hydrogen Systems.
7.12 Liquefied Hydrogen Systems.
7.13 Gas Generation Systems.
7.14 Dopant Gas Sources.
22 Chapter 8 Production and Support Equipment
8.1 General.
8.2 Materials of Construction.
8.3 Equipment Safety Systems and Interlocks.
8.4 Electrical Design.
8.5 Process Liquid Heating Equipment.
23 8.6 General Requirements for Tools Using Flammable or Combustible Liquids.
8.7 Photolithography Tools.
8.8 Ion Implanters.
8.9 Wet Process and Wet Etch Tools.
24 8.10 CVD and Furnace Tools.
8.11 Automated Materials Handling Systems (AMHS).
8.12 Support Equipment.
8.13 Production Equipment Fire Protection.
8.14 Exposures.
Chapter 9 Exhaust Systems
9.1 General Exhaust Conditions.
9.2 Local Hazardous Chemical Exhaust System.
9.3 Local Hazardous Chemical Exhaust System Construction.
25 9.4 Hazardous Chemical Exhaust Duct Airflow and Dilution.
9.5 Exhaust Ducts.
9.6 Hazardous Chemical Exhaust Controls.
Chapter 10 Waste Treatment
10.1 Waste Recovery and Handling Systems.
10.2 Acid Waste Treatment Facility Safeguards.
10.3 Organic Waste Treatment Facilities.
10.4 Waste Liquid Handling.
26 10.5 Effluent Treatment Systems.
10.6 Scrubbers.
10.7 Vapor Recovery and Vapor Processing Systems.
Chapter 11 Fire Protection
11.1 Facility-Wide Systems.
27 11.2 Protection of Specific Facility Elements.
29 Chapter 12 General Safety Precautions
12.1 Emergency Plan.
12.2 Emergency Response Team.
12.3 Emergency Drills.
Annex A Explanatory Material
35 Annex B Seismic Protection
Annex C Production and Support Equipment
36 Annex D Informational References

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NFPA 318 2022
$80.71