Only particle populations having cumulative distributions based on threshold (lower limit) particle sizes ranging from 0.1 µm to 5 µm are considered for classification purposes.

The use of light scattering airborne particle counters (LSAPCs) is the basis for determination of the concentration of airborne particles at designated sampling locations.

Concentrations of ultrafine particles (particles smaller than 0.1 µm) will be addressed in a separate standard.

An M descriptor (see Annex C) may be used to quantify populations of macroparticles (particles larger than 5 µm).

This Standard cannot be used to characterize the physical, chemical, radiological, viable or other nature of airborne particles.

NOTE The International Standard corresponding to this Standard and the symbol of degree of correspondence are as follows.

ISO 14644-1:2015 Cleanrooms and associated controlled environments—Part 1: Classification of air cleanliness by particle concentration (MOD)

In addition, symbols which denote the degree of correspondence in the contents between the relevant International Standard and JIS are IDT (identical), MOD (modified), and NEQ (not equivalent) according to ISO/IEC Guide 21-1.

The application of this Standard takes into account the following limitations.

– User requirements are as agreed by the customer and the supplier.

– Application-specific requirements are not addressed.

– Specific processes to be accommodated in the separative-device installation are not specified.

– Fire, safety and other regulatory matters are not considered specifically; where appropriate, national and local regulations apply.

NOTE: The International Standard corresponding to this Standard and the symbol of degree of correspondence are as follows:

ISO 14644-7 :2004 Cleanrooms and associated controlled environmentsPart 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments (MOD)

The symbols which denote the degree of correspondence in the contents between the relevant International Standard and JIS are IDT (identical), MOD (modified), and NEQ (not equivalent) according to ISO/ IEC Guide 21-1.

Performance tests are specified for two types of cleanrooms and clean zones: those with unidirectional flow and those with non-unidirectional flow, in three possible occupancy states: as-built, at-rest and operational.

The test methods recommend test apparatus and test procedures for determining performance parameters.

Where the test method is affected by the type of cleanroom or clean zone, alternative procedures are suggested.

For some of the tests, several different methods and apparatus are recommended to accommodate different end-use considerations.

Alternative methods not included in this Standard may be used if based on agreement between customer and supplier.

Alternative methods do not necessarily provide equivalent measurements.

NOTE: The International Standard corresponding to this Standard and the symbol of degree of correspondence are as follows:

ISO 14644-3: 2005 Cleanrooms and associated controlled environments—Part 3: Test methods (MOD)

The symbols which denote the degree of correspondence in the contents between JIS and the corresponding International Standard are IDT (identical), MOD (modified) and NEQ (not equivalent) according to ISO/lEC Guide 21.

This document applies to all solid surfaces in cleanrooms and associated controlled environments, such as walls, ceilings, floors, working environments, tools, equipment and products. The procedure for the assessment of surface cleanliness by particle concentration (SCP) is limited to particles of between 0,05 µm and 500 µm.

The following issues are not considered in this document:

—    requirements for the cleanliness and suitability of surfaces for specific processes;

—    procedures for the cleaning of surfaces;

—    material characteristics;

—    references to interactive bonding forces or generation processes that are usually time-dependent and process-dependent;

—    selection and use of statistical methods for assessment and testing;

—    other characteristics of particles, such as electrostatic charge, ionic charges and microbiological state.