{"id":233843,"date":"2024-10-19T15:15:00","date_gmt":"2024-10-19T15:15:00","guid":{"rendered":"https:\/\/pdfstandards.shop\/product\/uncategorized\/bs-iec-62047-302017\/"},"modified":"2024-10-25T09:45:52","modified_gmt":"2024-10-25T09:45:52","slug":"bs-iec-62047-302017","status":"publish","type":"product","link":"https:\/\/pdfstandards.shop\/product\/publishers\/bsi\/bs-iec-62047-302017\/","title":{"rendered":"BS IEC 62047-30:2017"},"content":{"rendered":"

This part of IEC 62047 specifies measuring methods of electro-mechanical conversion characteristics of piezoelectric thin film used for micro sensors and micro actuators, and its reporting schema to determine the characteristic parameters for consumer, industry or any other applications of piezoelectric devices. This document applies to piezoelectric thin films fabricated by MEMS process.<\/p>\n

PDF Catalog<\/h4>\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
PDF Pages<\/th>\nPDF Title<\/th>\n<\/tr>\n
2<\/td>\nNational foreword <\/td>\n<\/tr>\n
4<\/td>\nCONTENTS <\/td>\n<\/tr>\n
6<\/td>\nFOREWORD <\/td>\n<\/tr>\n
8<\/td>\n1 Scope
2 Normative references
3 Terms and definitions
4 Test bed of MEMS piezoelectric thin film
4.1 General <\/td>\n<\/tr>\n
9<\/td>\nFigures
Figure 1 \u2013 Test bed of direct and converse transverse piezoelectric coefficient of MEMS piezoelectric thin film <\/td>\n<\/tr>\n
10<\/td>\n4.2 Functional blocks and components
4.2.1 General
4.2.2 Clamp
4.2.3 Linear actuator
Tables
Table 1 \u2013 Symbols and designations of test bed <\/td>\n<\/tr>\n
11<\/td>\n4.2.4 Displacement meter
4.2.5 Electric measurement instrument
4.2.6 Power source
5 Thin film under testing
5.1 General
5.2 Measurement principle <\/td>\n<\/tr>\n
12<\/td>\n5.3 Measuring procedures of direct transverse piezoelectric coefficient
5.4 Measuring procedures of converse transverse piezoelectric coefficient <\/td>\n<\/tr>\n
13<\/td>\n6 Test report <\/td>\n<\/tr>\n
15<\/td>\nAnnex A (informative) Example of measuring method of MEMS piezoelectric thin film
A.1 General
A.2 Sample preparation procedures
A.3 Measuring procedures
A.3.1 Measuring procedures of direct transverse piezoelectric coefficient <\/td>\n<\/tr>\n
16<\/td>\nTable A.1 \u2013 Poling treatment conditions
Table A.2 \u2013 Material properties for calculation ofdirect transverse piezoelectric coefficient
Table A.3 \u2013 Output voltage and calculated transverse piezoelectric coefficient <\/td>\n<\/tr>\n
17<\/td>\nA.3.2 Measuring procedures of converse transverse piezoelectric coefficient
Figure A.1 \u2013 Tip displacement and calculated directtransverse piezoelectric coefficient <\/td>\n<\/tr>\n
18<\/td>\nTable A.4 \u2013 Material properties for calculation of converse transverse piezoelectric coefficient
Table A.5 \u2013 Tip displacement of cantilever and calculated transverse piezoelectric coefficient <\/td>\n<\/tr>\n
19<\/td>\nFigure A.2 \u2013 Input voltage and calculated converse transverse piezoelectric coefficient <\/td>\n<\/tr>\n
20<\/td>\nA.4 Test report
Table A.6 \u2013 Example of measuring conditions and results of electro-mechanicalcharacteristics of piezoelectric thin film as mandatory <\/td>\n<\/tr>\n
21<\/td>\nA.5 Equation of neutral plane
Table A.7 \u2013 Example of measuring conditions and results of electro-mechanical characteristics of piezoelectric thin film as optional <\/td>\n<\/tr>\n
22<\/td>\nBibliography <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":"

Semiconductor devices. Micro-electromechanical devices – Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film<\/b><\/p>\n\n\n\n\n
Published By<\/td>\nPublication Date<\/td>\nNumber of Pages<\/td>\n<\/tr>\n
BSI<\/b><\/a><\/td>\n2017<\/td>\n24<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n","protected":false},"featured_media":233849,"template":"","meta":{"rank_math_lock_modified_date":false,"ep_exclude_from_search":false},"product_cat":[2641],"product_tag":[],"class_list":{"0":"post-233843","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-bsi","8":"first","9":"instock","10":"sold-individually","11":"shipping-taxable","12":"purchasable","13":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product\/233843","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/types\/product"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media\/233849"}],"wp:attachment":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media?parent=233843"}],"wp:term":[{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_cat?post=233843"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_tag?post=233843"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}