{"id":290636,"date":"2024-10-19T19:43:30","date_gmt":"2024-10-19T19:43:30","guid":{"rendered":"https:\/\/pdfstandards.shop\/product\/uncategorized\/bs-iso-134242013\/"},"modified":"2024-10-25T16:43:54","modified_gmt":"2024-10-25T16:43:54","slug":"bs-iso-134242013","status":"publish","type":"product","link":"https:\/\/pdfstandards.shop\/product\/publishers\/bsi\/bs-iso-134242013\/","title":{"rendered":"BS ISO 13424:2013"},"content":{"rendered":"
This International Standard specifies the minimum amount of information required in reports of analyses of thin films on a substrate by XPS. These analyses involve measurement of the chemical composition and thickness of homogeneous thin films, and measurement of the chemical composition as a function of depth of inhomogeneous thin films by angle-resolved XPS, XPS sputter-depth profiling, peak-shape analysis, and variable photon energy XPS.<\/p>\n
PDF Pages<\/th>\n | PDF Title<\/th>\n<\/tr>\n | ||||||
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6<\/td>\n | Foreword <\/td>\n<\/tr>\n | ||||||
7<\/td>\n | Introduction <\/td>\n<\/tr>\n | ||||||
9<\/td>\n | Section sec_1 Section sec_2 Section sec_3 Section sec_4 Section sec_5 Section sec_5.1 1\tScope 2\tNormative references 3\tTerms and definitions 4\tAbbreviated terms 5\tOverview of thin-film analysis by XPS 5.1\tIntroduction <\/td>\n<\/tr>\n | ||||||
10<\/td>\n | Table tab_1 <\/td>\n<\/tr>\n | ||||||
11<\/td>\n | Section sec_5.2 Section sec_5.3 Section sec_5.4 Section sec_5.5 Section sec_5.6 5.2\tGeneral XPS 5.3\tAngle-resolved XPS 5.4\tPeak-shape analysis 5.5\tVariable photon energy XPS 5.6\tXPS with sputter-depth profiling <\/td>\n<\/tr>\n | ||||||
12<\/td>\n | Section sec_6 Section sec_7 Section sec_7.1 Section sec_7.2 Section sec_7.2.1 Section sec_7.2.2 Section sec_7.2.3 Section sec_7.2.4 6\tSpecimen handling 7\tInstrument and operating conditions 7.1\tInstrument calibration 7.2\tOperating conditions <\/td>\n<\/tr>\n | ||||||
13<\/td>\n | Section sec_8 Section sec_8.1 Section sec_8.2 Section sec_8.2.1 Section sec_8.2.2 Section sec_8.2.3 Section sec_8.2.4 8\tReporting XPS method, experimental conditions, analysis parameters, and analytical results 8.1\tXPS method for thin-film analysis 8.2\tExperimental conditions <\/td>\n<\/tr>\n | ||||||
14<\/td>\n | Section sec_8.2.5 Section sec_8.2.6 Section sec_8.2.7 Section sec_8.3 Section sec_8.3.1 Section sec_8.3.2 8.3\tAnalysis parameters <\/td>\n<\/tr>\n | ||||||
15<\/td>\n | Section sec_8.3.3 Section sec_8.3.4 Section sec_8.3.5 Section sec_8.3.6 Section sec_8.4 Table tab_2 8.4\tExamples of summary tables <\/td>\n<\/tr>\n | ||||||
17<\/td>\n | Table tab_3 Section sec_8.5 8.5\tAnalytical Results <\/td>\n<\/tr>\n | ||||||
18<\/td>\n | Annex sec_A Annex sec_A.1 Annex sec_A.2 Annex\u00a0A \n(informative)<\/p>\n General XPS <\/td>\n<\/tr>\n | ||||||
20<\/td>\n | Annex sec_A.3 <\/td>\n<\/tr>\n | ||||||
22<\/td>\n | Annex sec_A.4 Annex sec_A.5 <\/td>\n<\/tr>\n | ||||||
23<\/td>\n | Annex sec_A.5.1 <\/td>\n<\/tr>\n | ||||||
24<\/td>\n | Figure fig_A.1 Table tab_A.1 <\/td>\n<\/tr>\n | ||||||
25<\/td>\n | Figure fig_A.2 <\/td>\n<\/tr>\n | ||||||
26<\/td>\n | Annex sec_B Annex sec_B.1 Annex sec_B.2 Annex\u00a0B \n(informative)<\/p>\n Angle-resolved XPS <\/td>\n<\/tr>\n | ||||||
27<\/td>\n | Annex sec_B.3 <\/td>\n<\/tr>\n | ||||||
29<\/td>\n | Annex sec_B.3.1 <\/td>\n<\/tr>\n | ||||||
30<\/td>\n | Annex sec_B.3.2 Annex sec_B.3.3 Annex sec_B.3.4 Annex sec_B.4 <\/td>\n<\/tr>\n | ||||||
31<\/td>\n | Figure fig_B.1 <\/td>\n<\/tr>\n | ||||||
32<\/td>\n | Annex sec_C Annex sec_C.1 Annex sec_C.2 Annex\u00a0C \n(informative)<\/p>\n Peak-shape analysis <\/td>\n<\/tr>\n | ||||||
33<\/td>\n | Figure fig_C.1 Annex sec_C.3 <\/td>\n<\/tr>\n | ||||||
34<\/td>\n | Figure fig_C.2 Annex sec_C.3.1 <\/td>\n<\/tr>\n | ||||||
35<\/td>\n | Annex sec_C.3.2 Figure fig_C.3 <\/td>\n<\/tr>\n | ||||||
36<\/td>\n | Table tab_C.1 Annex sec_C.3.3 Table tab_C.2 <\/td>\n<\/tr>\n | ||||||
38<\/td>\n | Figure fig_C.4 Annex sec_C.3.4 <\/td>\n<\/tr>\n | ||||||
41<\/td>\n | Table tab_C.3 <\/td>\n<\/tr>\n | ||||||
42<\/td>\n | Figure fig_C.5 Table tab_C.4 <\/td>\n<\/tr>\n | ||||||
44<\/td>\n | Figure fig_C.6 <\/td>\n<\/tr>\n | ||||||
45<\/td>\n | Annex sec_D Annex sec_D.1 Annex sec_D.2 Annex sec_D.3 Annex\u00a0D \n(informative)<\/p>\n XPS with sputter-depth profiling <\/td>\n<\/tr>\n | ||||||
46<\/td>\n | Figure fig_D.1 <\/td>\n<\/tr>\n | ||||||
47<\/td>\n | Figure fig_D.2 <\/td>\n<\/tr>\n | ||||||
48<\/td>\n | Reference ref_1 Reference ref_2 Reference ref_3 Reference ref_4 Reference ref_5 Reference ref_6 Reference ref_7 Reference ref_8 Reference ref_9 Reference ref_10 Reference ref_11 Reference ref_12 Reference ref_13 Reference ref_14 Reference ref_15 Reference ref_16 Reference ref_17 Bibliography <\/td>\n<\/tr>\n | ||||||
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53<\/td>\n | Reference ref_93 Reference ref_94 Reference ref_95 Reference ref_96 Reference ref_97 Reference ref_98 Reference ref_99 Reference ref_100 Reference ref_101 Reference ref_102 Reference ref_103 Reference ref_104 Reference ref_105 Reference ref_106 Reference ref_107 Reference ref_108 Reference ref_109 <\/td>\n<\/tr>\n | ||||||
54<\/td>\n | Reference ref_110 Reference ref_111 Reference ref_112 Reference ref_113 Reference ref_114 Reference ref_115 Reference ref_116 Reference ref_117 Reference ref_118 <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":" Surface chemical analysis. X-ray photoelectron spectroscopy. Reporting of results of thin-film analysis<\/b><\/p>\n |