This document is designed to allow the user to assess, on a regular basis, several key parameters of an X\u2011ray photoelectron spectrometer. It is not intended to provide an exhaustive performance check, but instead provides a rapid set of tests that can be conducted frequently.<\/p>\n
Aspects of instrument behaviour covered by this document include the vacuum, measurements of spectra of conductive or non-conductive test specimens and the current state of the X\u2011ray source. Other important aspects of the instrument performance (e.g. lateral resolution) fall outside the scope of this document.<\/p>\n
The document is intended for use with commercial X\u2011ray photoelectron spectrometers equipped with a monochromated Al K\u03b1 X\u2011ray source or with an unmonochromated Al or Mg K\u03b1 X\u2011ray source.<\/p>\n
| PDF Pages<\/th>\n | PDF Title<\/th>\n<\/tr>\n | ||||||
|---|---|---|---|---|---|---|---|
| 2<\/td>\n | National foreword <\/td>\n<\/tr>\n | ||||||
| 6<\/td>\n | Foreword <\/td>\n<\/tr>\n | ||||||
| 7<\/td>\n | Introduction <\/td>\n<\/tr>\n | ||||||
| 9<\/td>\n | 1 Scope 2 Normative references 3 Terms, definitions and abbreviations 4 Initial approach <\/td>\n<\/tr>\n | ||||||
| 10<\/td>\n | 5 Initial instrument calibration, alignment and assessment 6 Test specimen selection 6.1 General information <\/td>\n<\/tr>\n | ||||||
| 11<\/td>\n | 6.2 The conductive specimen 6.3 The non-conductive specimen <\/td>\n<\/tr>\n | ||||||
| 12<\/td>\n | 6.4 Specimen for assessing the X\u2011ray source <\/td>\n<\/tr>\n | ||||||
| 13<\/td>\n | 7 Collection of reference data 7.1 General information 7.2 Rapid test of the instrument using a conductive specimen 7.2.1 Specimen mounting and pre-treatment 7.2.2 Survey spectrum <\/td>\n<\/tr>\n | ||||||
| 15<\/td>\n | 7.2.3 High-resolution spectrum <\/td>\n<\/tr>\n | ||||||
| 16<\/td>\n | 7.3 Rapid test of the instrument using a non-conductive specimen 7.3.1 Specimen mounting and positioning 7.3.2 High-resolution spectrum 7.4 Rapid test of the X\u2011ray source using a phosphor specimen <\/td>\n<\/tr>\n | ||||||
| 17<\/td>\n | 7.5 Rapid test of the X\u2011ray source using a uniform conductive specimen 8 Collection of subsequent performance data <\/td>\n<\/tr>\n | ||||||
| 18<\/td>\n | 9 Analysis of the performance data 9.1 General information 9.2 Survey spectrum 9.3 High-resolution spectrum from the conductive specimen 9.4 High-resolution spectrum from the non-conductive specimen 9.5 Images from the phosphor specimen 9.6 Images from the uniform conductive specimen <\/td>\n<\/tr>\n | ||||||
| 19<\/td>\n | 9.7 Spectrum ratios <\/td>\n<\/tr>\n | ||||||
| 23<\/td>\n | 10 Control charts <\/td>\n<\/tr>\n | ||||||
| 26<\/td>\n | Bibliography <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":" Surface chemical analysis. X-ray photoelectron spectroscopy. Procedures for assessing the day-to-day performance of an X-ray photoelectron spectrometer<\/b><\/p>\n |