This document establishes appropriate testing processes to determine the cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). This document is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, worksurfaces, tools, equipment and devices. NOTE 1 For the purpose of this document, consideration is only given to the chemical characteristics of a particle. The physical properties of the particle are not considered and this document does not cover the interaction between the contamination and the surface. NOTE 2 This document does not include the contamination generation process or any time-dependent influences (e.g. deposition, sedimentation, ageing) or process-dependent activities such as transportation and handling. Neither does it include guidance on statistical quality-control techniques to ensure compliance.<\/p>\n
| PDF Pages<\/th>\n | PDF Title<\/th>\n<\/tr>\n | ||||||
|---|---|---|---|---|---|---|---|
| 1<\/td>\n | 30485177 <\/td>\n<\/tr>\n | ||||||
| 50<\/td>\n | A-30430230 <\/td>\n<\/tr>\n | ||||||
| 51<\/td>\n | undefined <\/td>\n<\/tr>\n | ||||||
| 54<\/td>\n | European foreword Endorsement notice <\/td>\n<\/tr>\n | ||||||
| 58<\/td>\n | Foreword <\/td>\n<\/tr>\n | ||||||
| 59<\/td>\n | 1 Scope 2 Normative references 3 Terms and definitions <\/td>\n<\/tr>\n | ||||||
| 60<\/td>\n | 4 Testing and grading surface chemical levels 4.1 Principles for testing the surface chemical contamination levels of clean surfaces in cleanrooms and controlled environments 4.2 ISO SCC descriptor format <\/td>\n<\/tr>\n | ||||||
| 62<\/td>\n | 4.3 ISO-SCC grade level 4.4 Converter for substances into surface atomic concentration <\/td>\n<\/tr>\n | ||||||
| 63<\/td>\n | 5 Measuring the cleanliness of surfaces for chemical contamination and demonstration of grade level compliance 5.1 Criteria for good cleanliness assessment <\/td>\n<\/tr>\n | ||||||
| 64<\/td>\n | 5.2 Documentation and reporting 5.2.1 Principle 5.2.2 Testing 5.2.3 Test report <\/td>\n<\/tr>\n | ||||||
| 66<\/td>\n | Annex A (informative) Conversion between different unit expressions of surface concentration for chemical substances <\/td>\n<\/tr>\n | ||||||
| 73<\/td>\n | Annex B (informative) Parameters influencing testing and interpretation of results <\/td>\n<\/tr>\n | ||||||
| 74<\/td>\n | Annex C (informative) Essential considerations for a good cleanliness assessment <\/td>\n<\/tr>\n | ||||||
| 75<\/td>\n | Annex D (informative) Methods for testing surface cleanliness for chemical concentration <\/td>\n<\/tr>\n | ||||||
| 87<\/td>\n | Annex E (informative) Test record documentation <\/td>\n<\/tr>\n | ||||||
| 88<\/td>\n | Bibliography <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":" Tracked Changes. Cleanrooms and associated controlled environments – Part 10: Assessment of surface cleanliness for chemical contamination<\/b><\/p>\n |