{"id":573376,"date":"2024-11-05T19:38:01","date_gmt":"2024-11-05T19:38:01","guid":{"rendered":"https:\/\/pdfstandards.shop\/product\/uncategorized\/iec-62047-162015\/"},"modified":"2024-11-05T19:38:01","modified_gmt":"2024-11-05T19:38:01","slug":"iec-62047-162015","status":"publish","type":"product","link":"https:\/\/pdfstandards.shop\/product\/publishers\/iec\/iec-62047-162015\/","title":{"rendered":"IEC 62047-16:2015"},"content":{"rendered":"<p>IEC 62047-16:2015 specifies the test methods to measure the residual stresses of films with thickness in the range of 0,01 \u00b5 to 10 \u00b5 in MEMS structures fabricated by wafer curvature or cantilever beam deflection methods.<\/p>\n","protected":false},"excerpt":{"rendered":"<p><b>Semiconductor devices &#8211; Micro-electromechanical devices &#8211; Part 16: Test methods for determining residual stresses of MEMS films &#8211; Wafer curvature and cantilever beam deflection methods<\/b><\/p>\n<table style=\"width: 100%\" border=\"0\" cellspacing=\"0\" cellpadding=\"0\">\n<tbody>\n<tr>\n<td>Published By<\/td>\n<td>Publication Date<\/td>\n<td>Number of Pages<\/td>\n<\/tr>\n<tr>\n<td><a href=\"https:\/\/pdfstandards.shop\/product-category\/publishers\/iec\/\"><b>IEC<\/b><\/a><\/td>\n<td>2015-03-05<\/td>\n<td>26<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n","protected":false},"featured_media":573389,"template":"","meta":{"rank_math_lock_modified_date":false,"ep_exclude_from_search":false},"product_cat":[577,2636],"product_tag":[],"class_list":{"0":"post-573376","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-31-080-99","7":"product_cat-iec","9":"first","10":"instock","11":"sold-individually","12":"shipping-taxable","13":"purchasable","14":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product\/573376","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/types\/product"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media\/573389"}],"wp:attachment":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media?parent=573376"}],"wp:term":[{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_cat?post=573376"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_tag?post=573376"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}