This standard establishes requirements and methods for the specification, evaluation, setup and use of laser interferometers. This standard will explicitly discuss only single-pass optics and a single axis of linear displacement measurement. The standard is currently limited to ionized gas laser interferometer systems. Only single-color lasers will be considered in this version of the laser standard. Single color will include both homodyne systems and heterodyne systems (see Appendix E) where operating frequencies all lie within a Doppler broadened frequency band associated with one specific atomic transition or Zeeman multiplet. Diode laser systems, chirp systems, and two-color interferometers may be included in future versions of this standard. It should be noted that the folded common path comparison technique of this standard could be used to compare any of the above systems to a standard He-Ne laser interferometer.<\/p>\n
| PDF Pages<\/th>\n | PDF Title<\/th>\n<\/tr>\n | ||||||
|---|---|---|---|---|---|---|---|
| 4<\/td>\n | FOREWORD <\/td>\n<\/tr>\n | ||||||
| 5<\/td>\n | COMMITTEE ROSTER <\/td>\n<\/tr>\n | ||||||
| 6<\/td>\n | CORRESPONDENCE WITH THE B89 COMMITTEE <\/td>\n<\/tr>\n | ||||||
| 7<\/td>\n | 1 SCOPE 2 DEFINITIONS <\/td>\n<\/tr>\n | ||||||
| 8<\/td>\n | Figure Fig. 2-1 Schematic Illustration of the Abbe Offset <\/td>\n<\/tr>\n | ||||||
| 11<\/td>\n | 3 SYSTEM PERFORMANCE EVALUATION: GENERAL CONSIDERATIONS <\/td>\n<\/tr>\n | ||||||
| 13<\/td>\n | 4 TEST PROCEDURE \u2014 LASER INTERFEROMETER COMPARISON TEST <\/td>\n<\/tr>\n | ||||||
| 14<\/td>\n | Tables \n Table 4.2- 1 Recommended Target Positions <\/td>\n<\/tr>\n | ||||||
| 18<\/td>\n | Table 4.7.2- 1 Sensitivity Coefficients Associated With <\/td>\n<\/tr>\n | ||||||
| 19<\/td>\n | Table 4.8- 1 Wavelength Corrections ( Parts in 106) for Low Humidity Air ( 25% RH) Table 4.8- 2 Wavelength Corrections ( Parts in 106) for Medium Humidity Air ( 50% RH) <\/td>\n<\/tr>\n | ||||||
| 20<\/td>\n | Table 4.8- 3 Wavelength Corrections ( Parts in 106) for High Humidity Air ( 75% RH) Table 4.8- 4 Combinations of Environmental Conditions <\/td>\n<\/tr>\n | ||||||
| 22<\/td>\n | 5 VERIFYING TEST PERFORMANCE, ESTIMATING BIAS IN THE TEST, AND UNCERTAINTY OF RESULTS <\/td>\n<\/tr>\n | ||||||
| 23<\/td>\n | Forms Form 4.10-1 Reporting Results for Intercomparison Test Form 4.10-2 Reporting Results for Sensor Calibration Form 4.10-3 Reporting Overall Result <\/td>\n<\/tr>\n | ||||||
| 25<\/td>\n | 6 MEASUREMENT EVALUATION <\/td>\n<\/tr>\n | ||||||
| 26<\/td>\n | Form 6-1 Sample Uncertainty Budget: Errors Predictable by Manufacturer <\/td>\n<\/tr>\n | ||||||
| 27<\/td>\n | Form 6-2 Sample Uncertainty Budget: Combining Manufacturer’s Reported Uncertainty With Additional Sources of Error for a Metrology Laboratory <\/td>\n<\/tr>\n | ||||||
| 28<\/td>\n | 7 REFERENCES <\/td>\n<\/tr>\n | ||||||
| 31<\/td>\n | NONMANDATORY APPENDICES \n NONMANDATORY APPENDIX A UNCERTAINTY BUDGET FOR INTERFEROMETRIC LENGTH MEASUREMENTS A- 1 INTRODUCTION A- 2 SOURCES OF ERROR <\/td>\n<\/tr>\n | ||||||
| 32<\/td>\n | Table A- 2.1- 1 Major Length- Dependent Errors: Uncertainties in Various Physical Parameters That Produce a 0.1 Part in 106 Uncertainty in Interferometric Length Measurements <\/td>\n<\/tr>\n | ||||||
| 35<\/td>\n | Table A- 2.4- 1 Quantitative Effects of Various Sources of Error A- 3 SAMPLE UNCERTAINTY BUDGET <\/td>\n<\/tr>\n | ||||||
| 39<\/td>\n | NONMANDATORY APPENDIX B METHODS FOR COMPARING TWO INTERFEROMETER SYSTEMS B- 1 FOUR METHODS FOR COMPARING INTERFEROMETERS <\/td>\n<\/tr>\n | ||||||
| 43<\/td>\n | B- 2 COMMENTS AND DETAILED DESCRIPTIONS OF THE FOUR COMPARISON METHODS <\/td>\n<\/tr>\n | ||||||
| 47<\/td>\n | NONMANDATORY APPENDIX C PERFORMING ACCURATE LINEAR MEASUREMENTS WITH A LASER INTERFEROMETER SYSTEM \u2014 BEST PROCEDURES AND PRACTICES C- 1 INTRODUCTION C- 2 LOCATION OF OPTICS <\/td>\n<\/tr>\n | ||||||
| 48<\/td>\n | C- 3 BEAM ALIGNMENT <\/td>\n<\/tr>\n | ||||||
| 49<\/td>\n | C- 4 WAVELENGTH COMPENSATION Table C- 4.4- 1 Sensor Accuracies <\/td>\n<\/tr>\n | ||||||
| 50<\/td>\n | C- 5 MATERIAL THERMAL EXPANSION COMPENSATION <\/td>\n<\/tr>\n | ||||||
| 51<\/td>\n | Table C- 5.3- 1 Typical Expansion Coefficients for Different Materials Used in Construction of Machine Tools and Their Position Feedback Systems <\/td>\n<\/tr>\n | ||||||
| 52<\/td>\n | C- 6 AIR TURBULENCE <\/td>\n<\/tr>\n | ||||||
| 53<\/td>\n | C- 7 OTHER ERROR SOURCES C- 8 CALIBRATION PROCEDURE <\/td>\n<\/tr>\n | ||||||
| 55<\/td>\n | NONMANDATORY APPENDIX D RETESTING OF INTERFEROMETER SYSTEMS <\/td>\n<\/tr>\n | ||||||
| 56<\/td>\n | NONMANDATORY APPENDIX E AC INTERFEROMETERS VERSUS DC INTERFEROMETERS <\/td>\n<\/tr>\n | ||||||
| 57<\/td>\n | NONMANDATORY APPENDIX F SUGGESTIONS FOR TESTING THE MASTER INTERFEROMETER AND ESTIMATING UNCERTAINTY F- 1 INTRODUCTION F- 2 MASTER INTERFEROMETER AND UNCERTAINTY <\/td>\n<\/tr>\n | ||||||
| 59<\/td>\n | Table F- 2- 1 Estimated Length- Dependent Uncertainties in the Interferometer Table F- 2- 2 Overall Uncertainty Budget for Length- Proportional Errors <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":" ASME B89.1.8 Performance Evaluation of Displacement-Measuring Laser Interferometers<\/b><\/p>\n |