{"id":29976,"date":"2024-10-17T03:24:40","date_gmt":"2024-10-17T03:24:40","guid":{"rendered":"https:\/\/pdfstandards.shop\/product\/uncategorized\/nfpa-318-12\/"},"modified":"2024-10-24T14:16:21","modified_gmt":"2024-10-24T14:16:21","slug":"nfpa-318-12","status":"publish","type":"product","link":"https:\/\/pdfstandards.shop\/product\/publishers\/nfpa\/nfpa-318-12\/","title":{"rendered":"NFPA 318 12"},"content":{"rendered":"

Safeguard people and property in semiconductor plants and research facilities with the 2012 NFPA 318. Up-to-date with the latest references to NFPA\u00ae codes and other documents, NFPA 318: Standard for the Protection of Semiconductor Fabrication Facilities applies to semiconductor fabrication facilities and comparable R&D areas in which hazardous chemicals are used, stored, and handled — containing a cleanroom or clean zone or both. Chapters cover core topics including:     Fire protection     Ventilation and exhaust systems     Construction     Chemical storage and handling     Hazardous gas cylinder storage and distribution     Bulk silane systems     Production and support equipment     Emergency control station     General safety precautions     Means of egress Three annexes provide helpful explanatory material; additional facts about seismic protection, and production and support equipment; and informational references. Facility engineers, owners, and managers, plant safety directors, safety trainers, risk insurers, and AHJs need the latest requirements for semiconductor fabrication facilities based on industry needs, new technology, and recent experience.<\/p>\n

PDF Catalog<\/h4>\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
PDF Pages<\/th>\nPDF Title<\/th>\n<\/tr>\n
2<\/td>\nImportant Notices and Disclaimers <\/td>\n<\/tr>\n
3<\/td>\nAdditional Notices and Disclaimers <\/td>\n<\/tr>\n
4<\/td>\n2.1 General
2.2 NFPA Publications <\/td>\n<\/tr>\n
7<\/td>\nChapter 1 Administration
1.1 Scope
1.2 Purpose
1.3 Retroactivity
1.4 Equivalency
1.5 Units
Chapter 2 Referenced Publications <\/td>\n<\/tr>\n
8<\/td>\n2.3 Other Publications
2.4 References for Extracts in Mandatory Sections
Chapter 3 Definitions
3.1 General
3.2 NFPA Official Definitions
3.3 General Definitions <\/td>\n<\/tr>\n
10<\/td>\nChapter 4 Fire Protection
4.1 Automatic Fire-Extinguishing Systems
4.2 Alarm Systems <\/td>\n<\/tr>\n
11<\/td>\n4.3 Detection Systems
Chapter 5 Ventilation and Exhaust Systems
5.1 Air Supply and Recirculation Systems
5.2 Local Hazardous Chemical Exhaust System
5.3 Local Hazardous Chemical Exhaust System Construction <\/td>\n<\/tr>\n
12<\/td>\n5.4 General Conditions
5.5 Hazardous Chemical Exhaust Duct Airflow and Dilution
5.6 Hazardous Chemical Exhaust Controls
Chapter 6 Construction
6.1 Classification of Occupancy
6.2 Noncombustible Construction Components
6.3 Fire Resistance Rating
6.4 Electrical Classification
6.5 Emergency Power System
6.6 Occupied Levels of Fabrication Areas
6.7 Pass-Throughs in Existing Exit Access Corridors
6.8 Fabrication Areas
6.9 Vertical Openings <\/td>\n<\/tr>\n
13<\/td>\nChapter 7 Chemical Storage and Handling
7.1 Hazardous Chemicals <\/td>\n<\/tr>\n
16<\/td>\n7.2 Flammable and Combustible Liquid Delivery Systems
7.3 Container Delivery
7.4 Liquid Waste Disposal
7.5 Spill Protection <\/td>\n<\/tr>\n
17<\/td>\n7.6 Supply Piping
7.7 Welding
7.8 Pyrophoric Liquids
Chapter 8 Hazardous Gas Cylinder Storage and Distribution
8.1 Packaging
8.2 Transport to the Semiconductor Facility
8.3 Distribution Systems <\/td>\n<\/tr>\n
18<\/td>\n8.4 Silane and Silane\/Nontoxic Mixes Storage and Dispensing Areas
8.5 Silane\/Toxic Mixes Storage and Dispensing Areas <\/td>\n<\/tr>\n
19<\/td>\n8.6 Flammable or Toxic Gases <\/td>\n<\/tr>\n
20<\/td>\n8.7 Vent Headers
8.8 Training
8.9 Treatment Systems.
Chapter 9 Bulk Silane Systems
9.1 Tube Trailer Systems <\/td>\n<\/tr>\n
21<\/td>\n9.2 Cylinder Pack Systems and 450 L (119 gal) Cylinders
Chapter 10 Production and Support Equipment
10.1 General
10.2 Interlocks
10.3 Electrical Design
10.4 Process Liquid Heating Equipment <\/td>\n<\/tr>\n
22<\/td>\n10.5 Materials of Construction
10.6 Vacuum Pumps
10.7 Hazardous Gas Delivery Systems
10.8 Tools Using Flammable or Combustible Chemicals
10.9 Gas-Detection Systems <\/td>\n<\/tr>\n
23<\/td>\n10.10 Emergency Alarm System
Chapter 11 Emergency Control Station
11.1 Emergency Control Station
Chapter 12 General Safety Precautions
12.1 Emergency Plan
12.2 Emergency Response Team
12.3 Emergency Drills
Chapter 13 Means of Egress
13.1 Means of Egress
13.2 Service Corridors <\/td>\n<\/tr>\n
24<\/td>\nAnnex A Explanatory Material <\/td>\n<\/tr>\n
28<\/td>\nAnnex B Seismic Protection
Annex C Production and Support Equipment <\/td>\n<\/tr>\n
29<\/td>\nAnnex D Informational References <\/td>\n<\/tr>\n
31<\/td>\nIndex <\/td>\n<\/tr>\n
33<\/td>\nFormal Interpretation <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":"

NFPA 318: Standard for the Protection of Semiconductor Fabrication Facilities<\/b><\/p>\n\n\n\n\n
Published By<\/td>\nPublication Date<\/td>\nNumber of Pages<\/td>\n<\/tr>\n
NFPA<\/b><\/a><\/td>\n2012<\/td>\n36<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n","protected":false},"featured_media":29977,"template":"","meta":{"rank_math_lock_modified_date":false,"ep_exclude_from_search":false},"product_cat":[2638],"product_tag":[],"class_list":{"0":"post-29976","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-nfpa","8":"first","9":"instock","10":"sold-individually","11":"shipping-taxable","12":"purchasable","13":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product\/29976","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/types\/product"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media\/29977"}],"wp:attachment":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media?parent=29976"}],"wp:term":[{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_cat?post=29976"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_tag?post=29976"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}