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BS ISO 15632:2021

BS ISO 15632:2021

$102.76

Microbeam analysis. Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers (EDS) for use with a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA)

Published By Publication Date Number of Pages
BSI 2021 22
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This document defines the most important quantities that characterize an energy-dispersive X?ray spectrometer consisting of a semiconductor detector, a pre-amplifier and a signal-processing unit as the essential parts. This document is only applicable to spectrometers with semiconductor detectors operating on the principle of solid-state ionization. This document specifies minimum requirements and how relevant instrumental performance parameters are to be checked for such spectrometers attached to a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA). The procedure used for the actual analysis is outlined in ISO 22309[ 2] and ASTM E1508[ 3] and is outside the scope of this document.

PDF Catalog

PDF Pages PDF Title
2 National foreword
6 Foreword
7 Introduction
9 1 Scope
2 Normative references
3 Terms and definitions
11 4 Requirements
4.1 General description
12 4.2 Energy resolution
4.3 Dead time
4.4 Peak-to-background ratio
13 4.5 Energy dependence of instrumental detection efficiency
5 Check of further performance parameters
5.1 General
5.2 Stability of the energy scale and resolution
5.3 Pile-up effects
5.4 Periodical check of spectrometer performance
14 Annex A (normative) Measurement of line widths (FWHMs) to determine the energy resolution of the spectrometer
18 Annex B (normative) Measurement of the L/K ratio as a measure for the energy dependence of the instrumental detection efficiency
20 Bibliography

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BS ISO 15632:2021
$102.76