This International Standard specifies a TXRF method for the measurement of the atomic surface density of elemental contamination on chemomechanically polished or epitaxial silicon wafer surfaces.<\/p>\n
The method is applicable to the following:<\/p>\n
elements of atomic number from 16 (S) to 92 (U);<\/p>\n<\/li>\n
contamination elements with atomic surface densities from 1 \u00d7 1010<\/sup> atoms\/cm2<\/sup> to 1 \u00d7 1014<\/sup> atoms\/cm2<\/sup>;<\/p>\n<\/li>\n contamination elements with atomic surface densities from 5 \u00d7 108<\/sup> atoms\/cm2<\/sup> to 5 \u00d7 1012<\/sup> atoms\/cm2<\/sup> using a VPD (vapour-phase decomposition) specimen preparation method (see 3.4).<\/p>\n<\/li>\n<\/ul>\n Reference materials <\/td>\n<\/tr>\n Relative sensitivity factor <\/td>\n<\/tr>\n Preparation of reference materials[6] <\/td>\n<\/tr>\n VPD-TXRF method <\/td>\n<\/tr>\n Glancing-angle settings <\/td>\n<\/tr>\n International inter-laboratory test results <\/td>\n<\/tr>\n Surface chemical analysis. Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy<\/b><\/p>\nPDF Catalog<\/h4>\n
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\n PDF Pages<\/th>\n PDF Title<\/th>\n<\/tr>\n \n 6<\/td>\n Foreword <\/td>\n<\/tr>\n \n 7<\/td>\n Introduction <\/td>\n<\/tr>\n \n 9<\/td>\n Section sec_1
Section sec_2
Section sec_3
Section sec_3.1
Section sec_3.2
Section sec_3.3
1\tScope
2\tNormative reference
3\tTerms and definitions <\/td>\n<\/tr>\n\n 10<\/td>\n Section sec_3.4
Section sec_3.5
Section sec_4
Section sec_5
4\tAbbreviated terms
5\tPrinciple <\/td>\n<\/tr>\n\n 11<\/td>\n Section sec_6
Section sec_6.1
Section sec_6.2
Section sec_6.3
Section sec_6.4
Section sec_6.5
Section sec_7
Section sec_7.1
Section sec_7.2
Section sec_8
Section sec_8.1
Section sec_8.2
Section sec_8.3
Section sec_8.4
Section sec_8.5
Section sec_8.6
6\tApparatus
7\tEnvironment for specimen preparation and measurement
8\tCalibration reference materials <\/td>\n<\/tr>\n\n 12<\/td>\n Section sec_9
Section sec_10
Section sec_10.1
Section sec_10.1.1
Section sec_10.1.2
Section sec_10.1.3
Section sec_10.1.4
Section sec_10.1.5
Section sec_10.1.6
Section sec_10.2
Section sec_10.2.1
Section sec_10.2.2
9\tSafety
10\tMeasurement procedure
10.1\tPreparation for measurement
10.2\tPreparing a calibration curve <\/td>\n<\/tr>\n\n 13<\/td>\n Section sec_10.2.3
Section sec_10.2.4
Section sec_10.2.5
Section sec_10.3
Section sec_10.3.1
Section sec_10.3.2
Section sec_11
Section sec_11.1
10.3\tMeasurement of a test specimen
11\tExpression of results
11.1\tMethod of calculation <\/td>\n<\/tr>\n\n 14<\/td>\n Section sec_11.2
Section sec_12
Section sec_13
11.2\tBlank correction
12\tPrecision
13\tTest report <\/td>\n<\/tr>\n\n 16<\/td>\n Annex sec_A
Annex sec_A.1
Annex sec_A.2
Annex sec_A.3
Annex sec_A.4
Annex sec_A.5
Annex sec_A.6
Annex sec_A.7
Annex sec_A.8
Annex\u00a0A
\n(informative)<\/p>\n\n 17<\/td>\n Annex sec_B
Annex sec_B.1
Table tab_c
Figure fig_B.1
Annex\u00a0B
\n(informative)<\/p>\n\n 19<\/td>\n Annex sec_B.2
Annex sec_B.3
Table tab_B.1
Table tab_B.2 <\/td>\n<\/tr>\n\n 20<\/td>\n Annex sec_B.4
Annex sec_B.5
Annex sec_B.6 <\/td>\n<\/tr>\n\n 21<\/td>\n Annex sec_C
Annex sec_C.1
Annex sec_C.2
Annex sec_C.3
Annex\u00a0C
\n(informative)<\/p>\n\n 22<\/td>\n Annex sec_C.4
Annex sec_C.4.1
Annex sec_C.4.2
Annex sec_C.4.3
Annex sec_C.5 <\/td>\n<\/tr>\n\n 23<\/td>\n Annex sec_C.6
Annex sec_C.7
Annex sec_C.8 <\/td>\n<\/tr>\n\n 24<\/td>\n Annex sec_D
Annex sec_D.1
Annex sec_D.2
Annex sec_D.3
Annex sec_D.4
Annex sec_D.4.1
Annex sec_D.4.2
Annex\u00a0D
\n(informative)<\/p>\n\n 25<\/td>\n Annex sec_D.4.3 <\/td>\n<\/tr>\n \n 26<\/td>\n Annex sec_E
Annex sec_E.1
Annex\u00a0E
\n(informative)<\/p>\n\n 27<\/td>\n Table tab_g
Figure fig_E.1
Annex sec_E.2 <\/td>\n<\/tr>\n\n 28<\/td>\n Table tab_h
Figure fig_E.2
Figure fig_E.3
Annex sec_E.3 <\/td>\n<\/tr>\n\n 29<\/td>\n Figure fig_E.4
Annex sec_E.4 <\/td>\n<\/tr>\n\n 30<\/td>\n Annex sec_F
Annex sec_F.1
Annex sec_F.2
Table tab_F.1
Annex sec_F.3
Annex\u00a0F
\n(informative)<\/p>\n\n 31<\/td>\n Annex sec_F.4
Annex sec_F.4.1
Annex sec_F.4.2
Annex sec_F.4.3
Annex sec_F.5
Annex sec_F.5.1
Table tab_F.2
Annex sec_F.5.2 <\/td>\n<\/tr>\n\n 32<\/td>\n Table tab_F.3 <\/td>\n<\/tr>\n \n 33<\/td>\n Reference ref_1
Reference ref_2
Reference ref_3
Reference ref_4
Reference ref_5
Reference ref_6
Reference ref_7
Reference ref_8
Reference ref_9
Reference ref_10
Reference ref_11
Reference ref_12
Reference ref_13
Reference ref_14
Reference ref_15
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\n Published By<\/td>\n Publication Date<\/td>\n Number of Pages<\/td>\n<\/tr>\n \n BSI<\/b><\/a><\/td>\n 2014<\/td>\n 36<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n","protected":false},"featured_media":290972,"template":"","meta":{"rank_math_lock_modified_date":false,"ep_exclude_from_search":false},"product_cat":[1000,2641],"product_tag":[],"class_list":{"0":"post-290965","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-71-040-40","7":"product_cat-bsi","9":"first","10":"instock","11":"sold-individually","12":"shipping-taxable","13":"purchasable","14":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product\/290965","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/types\/product"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media\/290972"}],"wp:attachment":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media?parent=290965"}],"wp:term":[{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_cat?post=290965"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_tag?post=290965"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}