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BSI 23/30481371 DC:2023 Edition

BSI 23/30481371 DC:2023 Edition

$13.70

BS EN IEC 62047-4 Semiconductor devices. Micro-electromechanical devices – Part 4. Generic specification for MEMS

Published By Publication Date Number of Pages
BSI 2023 21
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Status

Definitive
Pages

21
Publication Date

2023-10-20
Standard Number

23/30481371 DC
Title

BS EN IEC 62047-4 Semiconductor devices. Micro-electromechanical devices – Part 4. Generic specification for MEMS
Publisher

BSI
Committee

EPL/47
BSI 23/30481371 DC
$13.70