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BS EN 60749-7:2011

$102.76

Semiconductor devices. Mechanical and climatic test methods – Internal moisture content measurement and the analysis of other residual gases

Published By Publication Date Number of Pages
BSI 2011 16
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This International Standard specifies the testing and measurement of water vapour and other gas content of the atmosphere inside a metal or ceramic hermetically sealed device. The test is used as a measure of the quality of the sealing process and to provide information about the long-term chemical stability of the atmosphere inside the package. It is applicable to semiconductor devices sealed in such a manner but generally only used for high reliability applications such as military or aerospace. This test is destructive.

PDF Catalog

PDF Pages PDF Title
5 English

CONTENTS
6 FOREWORD
8 1 Scope
2 Normative references
3 Terms and definitions
4 Test apparatus
4.1 Mass spectrometer method
4.2 Mass spectrometer
10 4.3 Vacuum opening chamber
4.4 Piercing arrangement
4.5 Pressure-sensing device
11 5 Procedure
12 6 Failure criteria
7 Implementation
13 8 Summary
14 Bibliography
BS EN 60749-7:2011
$102.76