BS EN 60749-7:2011
$102.76
Semiconductor devices. Mechanical and climatic test methods – Internal moisture content measurement and the analysis of other residual gases
Published By | Publication Date | Number of Pages |
BSI | 2011 | 16 |
This International Standard specifies the testing and measurement of water vapour and other gas content of the atmosphere inside a metal or ceramic hermetically sealed device. The test is used as a measure of the quality of the sealing process and to provide information about the long-term chemical stability of the atmosphere inside the package. It is applicable to semiconductor devices sealed in such a manner but generally only used for high reliability applications such as military or aerospace. This test is destructive.
PDF Catalog
PDF Pages | PDF Title |
---|---|
5 | English CONTENTS |
6 | FOREWORD |
8 | 1 Scope 2 Normative references 3 Terms and definitions 4 Test apparatus 4.1 Mass spectrometer method 4.2 Mass spectrometer |
10 | 4.3 Vacuum opening chamber 4.4 Piercing arrangement 4.5 Pressure-sensing device |
11 | 5 Procedure |
12 | 6 Failure criteria 7 Implementation |
13 | 8 Summary |
14 | Bibliography |