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BS EN ISO 25178-603:2013

BS EN ISO 25178-603:2013

$167.15

Geometrical product specifications (GPS). Surface texture: Areal – Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments

Published By Publication Date Number of Pages
BSI 2013 40
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This part of ISO 25178 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.

PDF Catalog

PDF Pages PDF Title
6 Foreword
8 Introduction
9 Section sec_1
Section sec_2
Section sec_2.1
Section sec_2.1.1
Section sec_2.1.2
1 Scope
2 Terms and definitions
2.1 Terms and definitions related to all areal surface texture measurement methods
10 Table tab_a
Figure fig_1
Section sec_2.1.3
Section sec_2.1.4
Section sec_2.1.5
11 Section sec_2.1.6
Section sec_2.1.7
Table tab_b
Figure fig_2
Section sec_2.1.8
12 Table tab_c
Figure fig_3
Section sec_2.1.9
Section sec_2.1.10
13 Section sec_2.1.11
Section sec_2.1.12
Section sec_2.1.13
Section sec_2.1.14
Section sec_2.1.15
Section sec_2.1.16
14 Figure fig_4
15 Section sec_2.1.17
Section sec_2.1.18
Section sec_2.1.19
Section sec_2.1.20
Section sec_2.1.21
16 Table tab_1
Section sec_2.2
Section sec_2.2.1
Section sec_2.2.2
2.2 Terms and definitions related to x- and y-scanning systems
17 Table tab_2
Section sec_2.2.3
Section sec_2.2.4
Section sec_2.2.5
Section sec_2.2.6
Section sec_2.2.7
18 Section sec_2.2.8
Section sec_2.3
Section sec_2.3.1
Section sec_2.3.2
Section sec_2.3.3
Section sec_2.3.4
Section sec_2.3.5
2.3 Terms and definitions related to optical systems
19 Table tab_d
Figure fig_5
Section sec_2.3.6
Section sec_2.3.7
Section sec_2.3.8
20 Section sec_2.4
Section sec_2.4.1
Section sec_2.4.2
Section sec_2.4.3
Section sec_2.4.4
Section sec_2.4.5
Section sec_2.4.6
Section sec_2.5
Section sec_2.5.1
2.4 Terms and definitions related to optical properties of the workpiece
2.5 Terms and definitions specific to phase-shifting interferometric microscopy
21 Section sec_2.5.2
Section sec_2.5.3
Section sec_2.5.4
Section sec_2.5.5
Section sec_3
Section sec_3.1
3 Descriptions of the influence quantities
3.1 General
22 Section sec_3.2
Table tab_3
3.2 Influence quantities
24 Annex sec_A
Annex sec_A.1
Annex sec_A.2
Annex sec_A.3
Annex A
(informative)

Components of a phase-shifting interferometric (PSI) microscope

25 Annex sec_B
Annex B
(informative)

Phase-shifting interferometric (PSI) microscope — Theory of operation

26 Table tab_e
Figure fig_B.1
27 Table tab_f
Figure fig_B.2
Table tab_g
Figure fig_B.3
28 Figure fig_B.4
29 Figure fig_B.5
30 Annex sec_C
Annex sec_C.1
Annex sec_C.2
Figure fig_C.1
Annex C
(informative)

Errors and corrections for phase-shifting interferometric (PSI) microscopes

31 Figure fig_C.2
Annex sec_C.3
Annex sec_C.4
Annex sec_C.5
32 Annex sec_C.6
Annex sec_C.7
Annex sec_C.8
Annex sec_C.9
Annex sec_C.10
Annex sec_C.11
Annex sec_C.12
33 Annex sec_D
Annex sec_D.1
Annex sec_D.2
Table tab_D.1
Annex D
(informative)

Relation to the GPS matrix model

34 Annex sec_D.3
35 Reference ref_1
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Bibliography
36 Reference ref_22
Reference ref_23
Reference ref_24
Reference ref_25
Reference ref_26
Reference ref_27
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Reference ref_29
Reference ref_30

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BS EN ISO 25178-603:2013
$167.15