{"id":290611,"date":"2024-10-19T19:43:22","date_gmt":"2024-10-19T19:43:22","guid":{"rendered":"https:\/\/pdfstandards.shop\/product\/uncategorized\/bs-iso-130832015\/"},"modified":"2024-10-25T16:43:45","modified_gmt":"2024-10-25T16:43:45","slug":"bs-iso-130832015","status":"publish","type":"product","link":"https:\/\/pdfstandards.shop\/product\/publishers\/bsi\/bs-iso-130832015\/","title":{"rendered":"BS ISO 13083:2015"},"content":{"rendered":"

PDF Catalog<\/h4>\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
PDF Pages<\/th>\nPDF Title<\/th>\n<\/tr>\n
6<\/td>\nForeword <\/td>\n<\/tr>\n
7<\/td>\nIntroduction <\/td>\n<\/tr>\n
9<\/td>\n1\tScope
2\tNormative references
3\tTerms and definitions
4\tSymbols and abbreviated terms <\/td>\n<\/tr>\n
10<\/td>\n5\tGeneral information
5.1\tBackground information
5.2\tTarget
5.2.1\tScanning capacitance microscope
5.2.2\tScanning spreading resistance microscope <\/td>\n<\/tr>\n
11<\/td>\n5.3\tMeasurement method for lateral resolution in SCM and SSRM <\/td>\n<\/tr>\n
13<\/td>\n5.4\tKey parameters in determining the lateral resolution
6\tMeasurement of lateral resolution of SCM with the sharp-edge method
6.1\tBackground information
6.2\tSelection of the sample <\/td>\n<\/tr>\n
14<\/td>\n6.3\tSetting the parameters before the operation of the instrument
6.4\tData collection
6.5\tData analysis
6.5.1\tObtaining the resolution <\/td>\n<\/tr>\n
15<\/td>\n6.5.2\tRandom contributions to the resolution value
6.6\tRecording of the parameters <\/td>\n<\/tr>\n
16<\/td>\n7\tMeasurement of lateral resolution of SSRM with the sharp-edge method
7.1\tBackground information
7.2\tSelection of the sample
7.3\tSetting the parameters before the operation of the instrument
7.4\tData collection
7.5\tData analysis
7.5.1\tObtaining the resolution <\/td>\n<\/tr>\n
17<\/td>\n7.5.2\tRandom contributions to the resolution value
7.6\tRecording of the parameters <\/td>\n<\/tr>\n
18<\/td>\nAnnex\u00a0A (informative) An example of the measurement of SCM resolution <\/td>\n<\/tr>\n
20<\/td>\nAnnex\u00a0B (informative) An example of the measurement of SSRM resolution <\/td>\n<\/tr>\n
22<\/td>\nBibliography <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":"

Surface chemical analysis. Scanning probe microscopy. Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes<\/b><\/p>\n\n\n\n\n
Published By<\/td>\nPublication Date<\/td>\nNumber of Pages<\/td>\n<\/tr>\n
BSI<\/b><\/a><\/td>\n2015<\/td>\n26<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n","protected":false},"featured_media":290613,"template":"","meta":{"rank_math_lock_modified_date":false,"ep_exclude_from_search":false},"product_cat":[1000,2641],"product_tag":[],"class_list":{"0":"post-290611","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-71-040-40","7":"product_cat-bsi","9":"first","10":"instock","11":"sold-individually","12":"shipping-taxable","13":"purchasable","14":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product\/290611","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/types\/product"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media\/290613"}],"wp:attachment":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media?parent=290611"}],"wp:term":[{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_cat?post=290611"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_tag?post=290611"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}