{"id":290947,"date":"2024-10-19T19:44:59","date_gmt":"2024-10-19T19:44:59","guid":{"rendered":"https:\/\/pdfstandards.shop\/product\/uncategorized\/bs-iso-146062015\/"},"modified":"2024-10-25T16:46:00","modified_gmt":"2024-10-25T16:46:00","slug":"bs-iso-146062015","status":"publish","type":"product","link":"https:\/\/pdfstandards.shop\/product\/publishers\/bsi\/bs-iso-146062015\/","title":{"rendered":"BS ISO 14606:2015"},"content":{"rendered":"

This International Standard gives guidance on the optimization of sputter-depth profiling parameters using appropriate single-layered and multilayered reference materials in order to achieve optimum depth resolution as a function of instrument settings in Auger electron spectroscopy, X-ray photoelectron spectroscopy and secondary ion mass spectrometry.<\/p>\n

This International Standard is not intended to cover the use of special multilayered systems such as delta doped layers.<\/p>\n

PDF Catalog<\/h4>\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
PDF Pages<\/th>\nPDF Title<\/th>\n<\/tr>\n
6<\/td>\nForeword <\/td>\n<\/tr>\n
7<\/td>\nIntroduction <\/td>\n<\/tr>\n
9<\/td>\n1\tScope
2\tTerms and definitions <\/td>\n<\/tr>\n
10<\/td>\n3\tSymbols and abbreviated terms
4\tSetting parameters for sputter depth profiling
4.1\tGeneral <\/td>\n<\/tr>\n
11<\/td>\n4.2\tAuger electron spectroscopy <\/td>\n<\/tr>\n
12<\/td>\n4.3\tX-ray photoelectron spectroscopy
4.4\tSecondary ion mass spectrometry
5\tDepth resolution at an ideally sharp interface in sputter depth profiles
5.1\tMeasurement of depth resolution <\/td>\n<\/tr>\n
13<\/td>\n5.2\tAverage sputtering rate
5.3\tDepth resolution \u2206z <\/td>\n<\/tr>\n
14<\/td>\n6\tProcedures for optimization of parameter settings
6.1\tAlignment of sputtered area with a smaller analysis area
6.1.1\tGeneral <\/td>\n<\/tr>\n
15<\/td>\n6.1.2\tAES
6.1.3\tXPS with a small probe (for example monochromator)
6.1.4\tXPS with a large area source (for example without monochromator)
6.1.5\tSIMS <\/td>\n<\/tr>\n
16<\/td>\n6.2\tOptimization of parameter settings <\/td>\n<\/tr>\n
17<\/td>\nAnnex\u00a0A (informative) Factors influencing the depth resolution <\/td>\n<\/tr>\n
19<\/td>\nAnnex\u00a0B (informative) Typical single-layered systems as reference materials <\/td>\n<\/tr>\n
20<\/td>\nAnnex\u00a0C (informative) Typical multilayered systems used as reference materials <\/td>\n<\/tr>\n
21<\/td>\nAnnex\u00a0D (informative) Uses of multilayered systems <\/td>\n<\/tr>\n
22<\/td>\nBibliography <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":"

Surface chemical analysis. Sputter depth profiling. Optimization using layered systems as reference materials<\/b><\/p>\n\n\n\n\n
Published By<\/td>\nPublication Date<\/td>\nNumber of Pages<\/td>\n<\/tr>\n
BSI<\/b><\/a><\/td>\n2015<\/td>\n28<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n","protected":false},"featured_media":290953,"template":"","meta":{"rank_math_lock_modified_date":false,"ep_exclude_from_search":false},"product_cat":[1000,2641],"product_tag":[],"class_list":{"0":"post-290947","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-71-040-40","7":"product_cat-bsi","9":"first","10":"instock","11":"sold-individually","12":"shipping-taxable","13":"purchasable","14":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product\/290947","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/types\/product"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media\/290953"}],"wp:attachment":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media?parent=290947"}],"wp:term":[{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_cat?post=290947"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_tag?post=290947"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}