This part of ISO 14644 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). This part of ISO 14644 is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices.<\/p>\n
\nNOTE 1 For the purpose of this part of ISO 14644, consideration is only given to the chemical characteristics of a particle. The physical properties of the particle are not considered and this part of ISO 14644 does not cover the interaction between the contamination and the surface.<\/p>\n<\/blockquote>\n
\nNOTE 2 This part of ISO 14644 does not include the contamination generation process and any time-dependent influences (deposition, sedimentation, ageing, etc.) or process-dependent activities such as transportation and handling. Neither does it include guidance on statistical quality control techniques to ensure compliance.<\/p>\n<\/blockquote>\n
PDF Catalog<\/h4>\n
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\n PDF Pages<\/th>\n PDF Title<\/th>\n<\/tr>\n \n 6<\/td>\n Foreword <\/td>\n<\/tr>\n \n 7<\/td>\n Section sec_1
Section sec_2
Section sec_3
1\tScope
2\tNormative references
3\tTerms and definitions <\/td>\n<\/tr>\n\n 8<\/td>\n Section sec_4
Section sec_4.1
Section sec_4.2
4\tClassification
4.1\tPrinciples for establishing classification of clean surfaces in cleanrooms and controlled environments
4.2\tClassification for surface cleanliness by chemical concentration <\/td>\n<\/tr>\n\n 9<\/td>\n Table tab_1 <\/td>\n<\/tr>\n \n 10<\/td>\n Table tab_a
Figure fig_1
Section sec_4.3
Section sec_4.4
4.3\tISO-SCC designation
4.4\tConverter for substances into surface atomic concentration <\/td>\n<\/tr>\n\n 11<\/td>\n Section sec_5
Section sec_5.1
5\tMeasuring and monitoring the cleanliness of surfaces for chemical contamination and demonstration of compliance
5.1\tCriteria for good cleanliness assessment <\/td>\n<\/tr>\n\n 12<\/td>\n Section sec_5.2
Section sec_5.2.1
Section sec_5.2.2
Section sec_5.2.3
5.2\tDocumentation and reporting <\/td>\n<\/tr>\n\n 14<\/td>\n Annex sec_A
Annex sec_A.1
Annex sec_A.2
Table tab_A.1
Table tab_A.2
Annex\u00a0A
\n(informative)<\/p>\nConversion between different unit expressions of surface concentration for chemical substances <\/td>\n<\/tr>\n
\n 15<\/td>\n Table tab_A.3 <\/td>\n<\/tr>\n \n 16<\/td>\n Table tab_A.4 <\/td>\n<\/tr>\n \n 17<\/td>\n Table tab_e
Figure fig_A.1 <\/td>\n<\/tr>\n\n 18<\/td>\n Table tab_f
Figure fig_A.2 <\/td>\n<\/tr>\n\n 19<\/td>\n Table tab_g
Figure fig_A.3 <\/td>\n<\/tr>\n\n 20<\/td>\n Table tab_h
Figure fig_A.4 <\/td>\n<\/tr>\n\n 21<\/td>\n Annex sec_B
Annex sec_B.1
Annex sec_B.2
Annex\u00a0B
\n(informative)<\/p>\nParameters influencing testing and interpretation of results <\/td>\n<\/tr>\n
\n 22<\/td>\n Annex sec_C
Annex sec_C.1
Annex sec_C.2
Annex\u00a0C
\n(informative)<\/p>\nEssential considerations for a good cleanliness assessment <\/td>\n<\/tr>\n
\n 23<\/td>\n Annex sec_D
Annex sec_D.1
Annex sec_D.1.1
Annex sec_D.1.2
Figure fig_D.1
Annex sec_D.1.3
Annex\u00a0D
\n(informative)<\/p>\nMethods for testing surface cleanliness by chemical concentration <\/td>\n<\/tr>\n
\n 24<\/td>\n Table tab_i
Figure fig_D.2 <\/td>\n<\/tr>\n\n 25<\/td>\n Annex sec_D.2
Annex sec_D.2.1
Annex sec_D.2.2
Annex sec_D.2.3
Annex sec_D.2.3.1 <\/td>\n<\/tr>\n\n 26<\/td>\n Annex sec_D.2.3.2
Annex sec_D.2.3.3
Annex sec_D.2.4
Annex sec_D.2.4.1 <\/td>\n<\/tr>\n\n 27<\/td>\n Annex sec_D.2.4.2
Annex sec_D.2.5
Annex sec_D.2.6
Annex sec_D.2.7 <\/td>\n<\/tr>\n\n 28<\/td>\n Table tab_D.1 <\/td>\n<\/tr>\n \n 30<\/td>\n Annex sec_D.2.8
Table tab_D.2 <\/td>\n<\/tr>\n\n 32<\/td>\n Annex sec_D.2.9
Figure fig_D.3 <\/td>\n<\/tr>\n\n 33<\/td>\n Annex sec_D.2.10
Figure fig_D.4 <\/td>\n<\/tr>\n\n 34<\/td>\n Annex sec_E
Annex\u00a0E
\n(informative)<\/p>\nTest record documentation <\/td>\n<\/tr>\n
\n 35<\/td>\n Reference ref_1
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Reference ref_7
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Reference ref_11
Reference ref_12
Reference ref_13
Reference ref_14
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Reference ref_16
Bibliography <\/td>\n<\/tr>\n\n 36<\/td>\n Reference ref_17
Reference ref_18 <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":"Cleanrooms and associated controlled environments – Part 10: Classification of surface cleanliness by chemical concentration<\/b><\/p>\n
\n\n
\n Published By<\/td>\n Publication Date<\/td>\n Number of Pages<\/td>\n<\/tr>\n \n BSI<\/b><\/a><\/td>\n 2013<\/td>\n 40<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n","protected":false},"featured_media":302031,"template":"","meta":{"rank_math_lock_modified_date":false,"ep_exclude_from_search":false},"product_cat":[205,2641],"product_tag":[],"class_list":{"0":"post-302024","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-13-040-35","7":"product_cat-bsi","9":"first","10":"instock","11":"sold-individually","12":"shipping-taxable","13":"purchasable","14":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product\/302024","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/types\/product"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media\/302031"}],"wp:attachment":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media?parent=302024"}],"wp:term":[{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_cat?post=302024"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_tag?post=302024"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}